Design and applications of MEMS flow sensors: A review

F Ejeian, S Azadi, A Razmjou, Y Orooji… - Sensors and Actuators A …, 2019 - Elsevier
There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

Bioinspired artificial hair sensors for flight-by-feel of unmanned aerial vehicles: a review

AC Hollenbeck, R Grandhi, JH Hansen, AM Pankonien - AIAA Journal, 2023 - arc.aiaa.org
Flight-by-feel is an emerging approach to flight control that uses distributed arrays of
pressure, strain, and flow sensors to guide aircraft. Among these, hair-type flow sensors …

Bioinspired fluffy fabric with in situ grown carbon nanotubes for ultrasensitive wearable airflow sensor

H Wang, S Li, Y Wang, H Wang, X Shen… - Advanced …, 2020 - Wiley Online Library
Recently, electronic skin and smart textiles have attracted considerable attention. Flexible
sensors, as a kind of indispensable components of flexible electronics, have been …

Ultrasensitive, fast-responsive, directional airflow sensing by bioinspired suspended graphene fibers

L Huang, Y Liu, G Li, Y Song, J Su, L Cheng, W Guo… - Nano Letters, 2023 - ACS Publications
The development of high-performance miniaturized and flexible airflow sensors is essential
to meet the need of emerging applications. Graphene-based airflow sensors are hampered …

Ultrasensitive airflow sensors based on suspended carbon nanotube networks

Q Jiang, R Li, F Wang, X Shi, F Chen… - Advanced …, 2022 - Wiley Online Library
High‐performance airflow sensors are in great demand in numerous fields but still face
many challenges, such as slow response speed, low sensitivity, large detection threshold …

Bionic adaptive thin‐membranes sensory system based on microspring effect for high‐sensitive airflow perception and noncontact manipulation

W Zhou, P Xiao, Y Liang, Q Wang, D Liu… - Advanced Functional …, 2021 - Wiley Online Library
Recently airflow sensors based on mechanical deformation mechanisms have drawn
extensive attention due to their favorable flexibility and sensitivity. However, the fabrication …

Bioinspired Photoluminescent “Spider Web” as Ultrafast and Ultrasensitive Airflow–Acoustic Bimodal Sensor for Human–Computer Interaction and Intelligent …

K Zhu, B Yan - ACS Central Science, 2024 - ACS Publications
Nature provides massive biomimetic design inspiration for constructing structural materials
with desired performances. Spider webs can perceive vibrations generated by airflow and …

A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With 6 m/s Linear Range

W Xu, Z Li, Z Fang, B Wang, L Hong… - IEEE Journal of Solid …, 2023 - ieeexplore.ieee.org
This article presents a complementary metal-oxide semiconductor (CMOS)-
microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system …

Wall Shear Stress Sensors Based on Carbon Nanotube Pillars

BN Julien, N Holmes, RGS Ghode… - ACS Applied Nano …, 2023 - ACS Publications
Increasingly smaller fluid flow devices depend on increasingly smaller sensors to operate. In
this work, we develop a miniature wall shear stress sensor consisting of a pair of carbon …

Chip-scale optical airflow sensor

Y Luo, X An, L Chen, KH Li - Microsystems & Nanoengineering, 2022 - nature.com
Airflow sensors are an essential component in a wide range of industrial, biomedical, and
environmental applications. The development of compact devices with a fast response and …