Micron-scale shaped 2D or 2.5 D structures made of silver or copper can be produced by
combining silicon photolithographic etching with metal casting by pressure infiltration. This …

In this study, an optical method that allows simultaneous thickness measurements of two
different layers distributed over a broad thickness range from several tens of nanometers to …

Convex cylindrical silicon nanostructures, also referred to as silicon nanocones, find their
value in many applications ranging from photovoltaics to nanofluidics, nanophotonics, and …

Developing a new master mold-based patterning technology that can be used to accurately,
precisely, and uniformly create large-area micropatterns while controlling the micropatterns …

Three-dimensional (3D) etching of materials by plasmas is an ultimate challenge in
microstructuring applications. A method is proposed to reach a controllable 3D structure by …

A novel wafer-scale silicon fractal fabrication method is presented here for forming pyramids
only in the lateral direction using the crystal orientation of silicon. Fractals are fabricated in …