The Nanomech™ MEMS technology platform which implements arrays of MEMS devices
embedded inside the CMOS back end is described. The key advantages of this integration …

Abstract In this paper Radio Frequency micro-electromechanical system (RF MEMS)
switches in coplanar waveguide configuration designed for redundancy space applications …

An extensive electrical characterization of radio frequency microelectromechanical systems
(RF-MEMS) switches has been carried out to identify the dynamic response of both ohmic …

RF-MEMS switches have potential prerogatives better than traditional solid state devices,
but the presence of mechanical movement introduces new classes of reliability issues that …

Two-dimensional developing flow in the entrance of a microchannel has been studied
numerically. Due to its nature, a microchannel can be used in tight space applications and …

This paper reports on the investigation of failure mechanisms of aluminum nitride (AlN)-
based capacitive RF MEMS switches. Electrostatic discharge (ESD) experiments have been …

In this thesis work fluid flow and heat transfer in two-dimensional microchannels are studied
numerically. A computer code based on Lattice Boltzmann Method (LBM) is developed for …

Radio frequency micro-electromechanical (RF-MEM) switches, both ohmic and capacitive,
are important for future RF wired and wireless communication systems. In this paper …

The continuously evolving MEMS technology for RF/microwave applications poses issues
regarding new reliability and lifetime estimation. We overview the most important …

The influence of the suspension shape on the electrical parameters and on the reliability of
micro-machined ohmic series and shunt RF switches has been studied in this work. We …