Bidirectional CMOS-MEMS airflow sensor with sub-mW power consumption and high sensitivity
This article presents a bidirectional thermoresistive micro calorimetric flow (TMCF) sensor
implemented by a 0.18-μ m complementary metal–oxide–semiconductor …
implemented by a 0.18-μ m complementary metal–oxide–semiconductor …
Fully integrated bidirectional CMOS-MEMS flow sensor with low power pulse operation
Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow
sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas …
sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas …
Flexible calorimetric flow sensor with unprecedented sensitivity and directional resolution for multiple flight parameter detection
The accurate perception of multiple flight parameters, such as the angle of attack, angle of
sideslip, and airflow velocity, is essential for the flight control of micro air vehicles, which …
sideslip, and airflow velocity, is essential for the flight control of micro air vehicles, which …
A three-dimensional integrated micro calorimetric flow sensor in CMOS MEMS technology
This article presents a 3-D integrated molybdenum (Mo) thermoresistive microcalorimetric
flow sensor in a 0.18-μm CMOS MEMS technology. The sensor consists of a MEMS structure …
flow sensor in a 0.18-μm CMOS MEMS technology. The sensor consists of a MEMS structure …
A novel thermistor-based RF power sensor with wheatstone bridge fabricating on MEMS membrane
JH Li, X Liao, C Chu - Journal of Microelectromechanical …, 2020 - ieeexplore.ieee.org
A novel thermistor-based RF power sensor with Wheatstone full-bridge structure is proposed
using MEMS technology combined with monolithic microwave integrated circuit (MMIC) …
using MEMS technology combined with monolithic microwave integrated circuit (MMIC) …
A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process
In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with
the extended flow range by using InvenSense 0.18 μm CMOS MEMS technology. For the N …
the extended flow range by using InvenSense 0.18 μm CMOS MEMS technology. For the N …
A wafer-level packaged CMOS MEMS Pirani vacuum gauge
In this article, we report a wafer-level packaged Pirani vacuum gauge using the proprietary
InvenSense CMOS MEMS technology. The micro Pirani vacuum gauge features three …
InvenSense CMOS MEMS technology. The micro Pirani vacuum gauge features three …
A CMOS MEMS thermal flow sensor for gas and liquid with parylene-C coating
This brief presents a self-heated thermoresistive flow (SHTF) sensor for both gas and liquid
with Parylene-C coating using a 0.35-CMOS MEMS technology. For N 2 flow, the developed …
with Parylene-C coating using a 0.35-CMOS MEMS technology. For N 2 flow, the developed …
Micro Flow Sensor With High Sensitivity and Resolution Based on Thermal Feedback and Digitized Power Distribution
M Huang, H Luo, X Song, R Xu… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
In this article, we propose a micro flow sensor with enhanced sensitivity, resolution, and low
temperature drift, utilizing a new strategy of thermal feedback (TF) and digital power …
temperature drift, utilizing a new strategy of thermal feedback (TF) and digital power …
Single (111)-Wafer Single-Side Microfabrication of Suspended p+Si/n+Si Thermopile for Tiny-Size and High-Sensitivity Thermal Gas Flow Sensors
P Zhang, T Huang, J Wang, X Li - IEEE Sensors Journal, 2023 - ieeexplore.ieee.org
This article presents a tiny-size and high-performance thermal gas flow sensor with
suspended Si/Si thermopile formed in an ordinary non-silicon-on-insulator (SOI)(111) silicon …
suspended Si/Si thermopile formed in an ordinary non-silicon-on-insulator (SOI)(111) silicon …