Designing small structures necessitates an a priori understanding of various device
behaviors. The way to gain such understanding is to construct, analyze, and interpret the …

This paper, the first of two parts, presents an electromagnetic model for membrane
microelectromechanical systems (MEMS) shunt switches for microwave/millimeter-wave …

This paper reports on the design, fabrication, and testing of a low-actuation voltage
Microelectromechanical systems (MEMS) switch for high-frequency applications. The …

The practical design issues of an electrostatic micromechanical actuator that can travel
beyond the trademark limit of conventional actuators are presented in this paper. The …

An analysis of the dynamic characteristics of pull-in for parallel-plate and torsional
electrostatic actuators is presented. Traditionally, the analysis for pull-in has been done …

The" pull-in" or" snap-down" instability in electrostatically actuated microelectromechanical
systems (MEMS) presents a ubiquitous challenge in MEMS technology of great importance …

This study considers the dynamic response of electrostatic actuators with multiple degrees of
freedom that are driven by multiple voltage sources. The critical values of the applied …

Electrostatically actuated polysilicon beams fabricated in the multiuser MEMS process
(MUMPs) are studied, with an emphasis on the behavior when the beam is in contact with an …

This letter presents a one-bit low-loss K/K/sub a/-band phase shifter circuit that employs
microelectromechanical systems (MEMS) capacitors. The measured results demonstrate a …

The undamped dynamic response of electrostatic MEMS switches that are driven by a step-
function voltage is investigated. A systematic analysis using energy methods is presented …