Structural properties of thin ZnO films deposited by ald under O-rich and Zn-rich growth conditions and their relationship with electrical parameters

S Mishra, E Przezdziecka, W Wozniak, A Adhikari… - Materials, 2021 - mdpi.com
The structural, optical, and electrical properties of ZnO are intimately intertwined. In the
present work, the structural and transport properties of 100 nm thick polycrystalline ZnO films …

Spatial ALD of Al2O3 and ZnO using heavy water

S Kinnunen, T Sajavaara - Surface and Coatings Technology, 2022 - Elsevier
Al 2 O 3 and ZnO thin films were deposited from trimethylaluminium (TMA) and diethylzinc
(DEZ) in combination with water using cylindrical rotating substrate spatial atomic layer …

Variation of oxygen vacancy defects in sALD-ZnO films annealed in an oxygen-rich ambient

MJ Zhao, ZT Sun, WY Wu, CH Hsu… - ECS Journal of Solid …, 2021 - iopscience.iop.org
Oxygen vacancy defects play an important role in determining the properties of zinc oxide
(ZnO) film. In this study, ZnO film prepared by a high-deposition-rate spatial ALD process …

[HTML][HTML] The Impact of Carbon on Electronic Structure of N-Doped ZnO Films: Scanning Photoelectron Microscopy Study and DFT Calculations

E Guziewicz, S Mishra, M Amati, L Gregoratti… - …, 2024 - pmc.ncbi.nlm.nih.gov
A Scanning Photoelectron Microscopy (SPEM) experiment has been applied to ZnO: N films
deposited by Atomic Layer Deposition (ALD) under O-rich conditions and post-growth …

Cathodoluminescent Imaging of ZnO: N Films: Study of Annealing Processes Leading to Enhanced Acceptor Luminescence

S Mishra, BS Witkowski, R Jakiela… - … status solidi (a), 2023 - Wiley Online Library
A worldwide effort is under way to understand the activation of acceptor states in ZnO with
the motivation to achieve persistent p‐type conductivity. In this study, cathodoluminescent …

[HTML][HTML] SIMS and Numerical Analysis of Asymmetrical Out-Diffusion of Hydrogen and Carbon in CdxZn1−xO:Eu Multilayer

Z Khosravizadeh, A Lysak, E Przeździecka, R Jakieła - Materials, 2024 - mdpi.com
This study employs secondary ion mass spectrometry (SIMS) to investigate the diffusion
behavior of hydrogen and carbon in a Cd x Zn1− x O: Eu multilayer at different annealing …

Hydrogen and deuterium incorporation in ZnO films grown by atomic layer deposition

S Kinnunen, M Lahtinen, K Arstila, T Sajavaara - Coatings, 2021 - mdpi.com
Zinc oxide (ZnO) thin films were grown by atomic layer deposition using diethylzinc (DEZ)
and water. In addition to depositions with normal water, heavy water (2H2O) was used in …

[引用][C] Hydrogen and Deuterium Incorporation in ZnO Films Grown by Atomic Layer Deposition. Coatings 2021, 11, 542

S Kinnunen, M Lahtinen, K Arstila, T Sajavaara - 2021 - s Note: MDPI stays neutral with …