S Kinnunen, T Sajavaara - Surface and Coatings Technology, 2022 - Elsevier
Al 2 O 3 and ZnO thin films were deposited from trimethylaluminium (TMA) and diethylzinc (DEZ) in combination with water using cylindrical rotating substrate spatial atomic layer …
Oxygen vacancy defects play an important role in determining the properties of zinc oxide (ZnO) film. In this study, ZnO film prepared by a high-deposition-rate spatial ALD process …
E Guziewicz, S Mishra, M Amati, L Gregoratti… - …, 2024 - pmc.ncbi.nlm.nih.gov
A Scanning Photoelectron Microscopy (SPEM) experiment has been applied to ZnO: N films deposited by Atomic Layer Deposition (ALD) under O-rich conditions and post-growth …
S Mishra, BS Witkowski, R Jakiela… - … status solidi (a), 2023 - Wiley Online Library
A worldwide effort is under way to understand the activation of acceptor states in ZnO with the motivation to achieve persistent p‐type conductivity. In this study, cathodoluminescent …
This study employs secondary ion mass spectrometry (SIMS) to investigate the diffusion behavior of hydrogen and carbon in a Cd x Zn1− x O: Eu multilayer at different annealing …
Zinc oxide (ZnO) thin films were grown by atomic layer deposition using diethylzinc (DEZ) and water. In addition to depositions with normal water, heavy water (2H2O) was used in …