Defect engineering in SiC technology for high-voltage power devices

T Kimoto, H Watanabe - Applied Physics Express, 2020 - iopscience.iop.org
Major features of silicon carbide (SiC) power devices include high blocking voltage, low on-
state loss, and fast switching, compared with those of the Si counterparts. Through recent …

Current status and perspectives of ultrahigh-voltage SiC power devices

T Kimoto, Y Yonezawa - Materials Science in Semiconductor Processing, 2018 - Elsevier
Recent progress in the SiC material and ultrahigh-voltage devices is reviewed. Regarding
the material issues, fast epitaxial growth of high-purity epitaxial layers and reduction of basal …

Short minority carrier lifetimes in highly nitrogen-doped 4H-SiC epilayers for suppression of the stacking fault formation in PiN diodes

T Tawara, T Miyazawa, M Ryo, M Miyazato… - Journal of Applied …, 2016 - pubs.aip.org
We investigated the dependency of minority carrier lifetimes on the nitrogen concentration,
temperature, and the injected carrier concentration for highly nitrogen-doped 4H-SiC …

[HTML][HTML] Suppression of stacking fault expansion in a 4H-SiC epitaxial layer by proton irradiation

S Harada, T Mii, H Sakane, M Kato - Scientific Reports, 2022 - nature.com
SiC bipolar degradation, which is caused by stacking fault expansion from basal plane
dislocations in a SiC epitaxial layer or near the interface between the epitaxial layer and the …

Understanding and reduction of degradation phenomena in SiC power devices

T Kimoto, A Iijima, H Tsuchida… - 2017 IEEE …, 2017 - ieeexplore.ieee.org
Impacts of extended defects on performance and reliability of SiC power devices are
reviewed. Threading dislocations in the state-of-the-art SiC wafers do not work as the major …

Carrier lifetime and breakdown phenomena in SiC power device material

T Kimoto, H Niwa, T Okuda, E Saito… - Journal of Physics D …, 2018 - iopscience.iop.org
Recent progress and current understanding of carrier lifetimes and avalanche phenomena
in silicon carbide (SiC) are reviewed. The acceptor level of carbon vacancy (VC), called the …

Injected carrier concentration dependence of the expansion of single Shockley-type stacking faults in 4H-SiC PiN diodes

T Tawara, S Matsunaga, T Fujimoto, M Ryo… - Journal of Applied …, 2018 - pubs.aip.org
We investigated the relationship between the dislocation velocity and the injected carrier
concentration on the expansion of single Shockley-type stacking faults by monitoring the …

[HTML][HTML] Stacking fault expansion from basal plane dislocations converted into threading edge dislocations in 4H-SiC epilayers under high current stress

K Konishi, S Yamamoto, S Nakata… - Journal of Applied …, 2013 - pubs.aip.org
We evaluate the stacking faults (SFs) expansion from basal plane dislocations (BPDs)
converted into threading edge dislocations (TEDs) under the current stress to the pn devices …

Effects of ion implantation process on defect distribution in SiC SJ-MOSFET

T Fukui, T Ishii, T Tawara, K Takenaka… - Japanese Journal of …, 2023 - iopscience.iop.org
A superjunction (SJ) structure in power devices is compatible with low specific on-resistance
and high breakdown voltage. To fabricate the SJ structure in SiC power devices, the …

Wide-ranging control of carrier lifetimes in n-type 4H-SiC epilayer by intentional vanadium doping

K Murata, T Tawara, A Yang, R Takanashi… - Journal of Applied …, 2019 - pubs.aip.org
Wide-ranging control of carrier lifetimes in n-type epilayers by vanadium (V) doping is
attempted toward not only developing a buffer layer to prevent the stacking fault expansion …