Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

J Benedikt, H Kersten, A Piel - Plasma Sources Science and …, 2021 - iopscience.iop.org
This foundation article discusses the diagnostics of electrons and ions in plasmas and fluxes
of charged and neutral species toward plasma-facing surfaces by non-optical methods. The …

Plasma diagnostics for the low-pressure plasma polymerization process: A critical review

D Thiry, S Konstantinidis, J Cornil, R Snyders - Thin Solid Films, 2016 - Elsevier
Since the 1980s, functionalized plasma polymer films have attracted a considerable
attention owing to their promising utilization in a wide range of modern applications. For …

Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry

D Ellerweg, J Benedikt, A von Keudell… - New Journal of …, 2010 - iopscience.iop.org
The effluent of a microscale atmospheric pressure plasma jet (μ-APPJ) operated in helium
with a small admixture of molecular oxygen (< 1.6%) has been analyzed by means of two …

Plasma-chemical reactions: low pressure acetylene plasmas

J Benedikt - Journal of Physics D: Applied Physics, 2010 - iopscience.iop.org
Reactive plasmas are a well-known tool for material synthesis and surface modification.
They offer a unique combination of non-equilibrium electron and ion driven plasma …

[图书][B] Nonthermal plasma chemistry and physics

J Meichsner, M Schmidt, R Schneider, HE Wagner - 2013 - api.taylorfrancis.com
Plasma processing is one of the key technologies worldwide, especially using nonthermal,
low-temperature plasmas. Recently, the situation is characterized by the fast-growing …

Quadrupole mass spectrometry of reactive plasmas

J Benedikt, A Hecimovic, D Ellerweg… - Journal of Physics D …, 2012 - iopscience.iop.org
Reactive plasmas are highly valued for their ability to produce large amounts of reactive
radicals and of energetic ions bombarding surrounding surfaces. The non-equilibrium …

Ionization thresholds of small carbon clusters: tunable VUV experiments and theory

L Belau, SE Wheeler, BW Ticknor… - Journal of the …, 2007 - ACS Publications
Small carbon clusters (C n, n= 2− 15) are produced in a molecular beam by pulsed laser
vaporization and studied with vacuum ultraviolet (VUV) photoionization mass spectrometry …

Mass spectrometry of atmospheric pressure plasmas

S Große-Kreul, S Hübner, S Schneider… - Plasma Sources …, 2015 - iopscience.iop.org
Atmospheric pressure non-equilibrium plasmas (APPs) are effective source of radicals,
metastables and a variety of ions and photons, ranging into the vacuum UV spectral region …

Mass spectrometric diagnosis of an atmospheric pressure helium microplasma jet

K McKay, JS Oh, JL Walsh… - Journal of Physics D …, 2013 - iopscience.iop.org
Ambient molecular beam mass spectrometry (MBMS) has been used to study how different
capillary widths (530 µm and 2.4 mm) and excitation waveforms (continuous wave kHz and …

Mass spectrometric detection of short-living radicals produced by a plasma needle

E Stoffels, YA Gonzalvo, TD Whitmore… - Plasma Sources …, 2007 - iopscience.iop.org
A plasma needle is a radio-frequency (rf) micro-discharge operated in a mixture of helium
and air at atmospheric pressure. This source is designed for medical treatment of living …