A minimal observable length is a common feature of theories that aim to merge quantum
physics and gravity. Quantum mechanically, this concept is associated with a nonzero …

Damping is a critical design parameter for miniaturized mechanical resonators used in
microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS) …

The design of high-Q microresonators requires a careful evaluation of thermoelastic
damping (TED). Here, we consider the widely used class of flexural-mode bilayered beam …

In this paper, the effect of surfaces on the thermoelastic damping (TED) of nanoresonators is
studied. In addition to the classical surface elasticity, the concept of surface heat capacity is …

A double-sided wet etch process has been proposed to fabricate vertical structures in< 1 0
0> oriented silicon substrate. Both sides of a {1 0 0} silicon wafer have been patterned …

Radiation pressure and photothermal forces have been previously used to optically actuate
micro/nanomechanical structures fabricated from semiconductor piezoelectric materials …

Thermal noise is a limit to precision measurement in many fields. The relationship of the
quality factor of mechanical systems to the thermal noise has compelled many researchers …

Generating nonclassical states of light by optomechanical coupling depends critically on the
mechanical and optical properties of micro-oscillators and on the minimization of thermal …

We report on the mechanical losses measured in a “low-deformation mirror” micro-oscillator
designed to reduce as much as possible the strain in the coating layer and the resulting …

This paper describes a new manufacturing method for producing a double paddle oscillator
geometry using a printable fused silica glass suspension. The method includes casting a …