Ferroelectric behavior of sputter deposited Al0. 72Sc0. 28N approaching 5 nm thickness

JX Zheng, MMA Fiagbenu, G Esteves… - Applied Physics …, 2023 - pubs.aip.org
Ferroelectric Al 1− x Sc x N has raised much interest in recent years due to its unique
ferroelectric properties and complementary metal oxide semiconductor back-end-of-line …

Effect of deposition parameters on surface roughness and consequent electromagnetic performance of capacitive RF MEMS switches: a review

Z Chen, W Tian, X Zhang, Y Wang - Journal of Micromechanics …, 2017 - iopscience.iop.org
Surface roughness seriously affects the electromagnetic performance of capacitive radio
frequency (RF) micro-electromechanical system (MEMS) switches. This review presents the …

Influence of nitrogen flow rate on microstructural and nanomechanical properties of Zr–N thin films prepared by pulsed DC magnetron sputtering

A Singh, P Kuppusami, S Khan, C Sudha… - Applied Surface …, 2013 - Elsevier
Zr–N thin films were deposited on Si (100) substrate by reactive sputtering using a pulsed
DC magnetron sputtering technique. It was found that films deposited at 773K and 1sccm of …

Tribochemistry of contact interfaces of nanocrystalline molybdenum carbide films

DD Kumar, N Kumar, K Panda, AMK Kirubaharan… - Applied Surface …, 2018 - Elsevier
Transition metal carbides (TMC) are known for their improved tribological properties and are
sensitive to the tribo-atmospheric environment. Nanocrystalline molybdenum carbide (MoC) …

Deposition rate dependent phase/mechanical property evolution in zirconia and ceria-zirconia thin film by EB-PVD technique

P Arunkumar, U Aarthi, M Sribalaji, B Mukherjee… - Journal of Alloys and …, 2018 - Elsevier
Pure zirconia (ZrO 2) and ceria (16 mol%) stabilized zirconia (CeSZr) thin films were
prepared by electron beam physical vapor deposition with varying deposition rates (1, 4 and …

[HTML][HTML] High power impulse magnetron sputtering of a zirconium target

S Suresh Babu, J Fischer, K Barynova… - Journal of Vacuum …, 2024 - pubs.aip.org
High power impulse magnetron sputtering (HiPIMS) discharges with a zirconium target are
studied experimentally and by applying the ionization region model (IRM). The measured …

Tribological properties of sputter deposited ZrN coatings on titanium modified austenitic stainless steel

A Singh, N Kumar, P Kuppusami, TN Prasanthi… - Wear, 2012 - Elsevier
Tribological behaviour of ZrN coatings deposited on titanium modified austenitic stainless
steel (alloy D-9) substrates is investigated. The coatings were deposited in the deposition …

Effect of substrate temperature on microstructure and nanomechanical properties of Gd2Zr2O7 coatings prepared by EB-PVD technique

SA Jesuraj, P Kuppusami, T Dharini, P Panda… - Ceramics …, 2018 - Elsevier
In the present work, gadolinium zirconate (Gd 2 Zr 2 O 7) coatings have been developed on
Inconel-718 substrates by electron beam physical vapor deposition (EB-PVD) technique …

Microstructure and optical properties of Ba0. 6Sr0. 4TiO3 thin films prepared by pulsed laser deposition

B Vigneshwaran, P Kuppusami, A Panda… - Materials Research …, 2018 - iopscience.iop.org
Growth aspects of barium strontium titanate, Ba 0.6 Sr 0.4 TiO 3 (BST) thin films grown on Si
(100) and quartz substrates by pulsed laser deposition technique were investigated. The …

Oxidation behavior and adhesion performance of TiSi2–NbSi2 composite coating prepared via magnetron sputtering and then pack cementation

J He, X Guo, Y Qiao - Journal of Alloys and Compounds, 2020 - Elsevier
A TiSi 2–NbSi 2 composite coating has been successfully prepared on Nb–Si based
ultrahigh temperature alloys via firstly magnetron sputtering a Ti–5Al–10Nb–2Zr (at.%) thin …