Hot wire chemical vapor deposition chemistry in the gas phase and on the catalyst surface with organosilicon compounds
Y Shi - Accounts of Chemical Research, 2015 - ACS Publications
Conspectus Hot wire chemical vapor deposition (HWCVD), also referred to as catalytic CVD
(Cat-CVD), has been used to produce Si-containing thin films, nanomaterials, and functional …
(Cat-CVD), has been used to produce Si-containing thin films, nanomaterials, and functional …
Understanding the Reaction Chemistry of 1, 1, 3, 3-Tetramethyldisilazane as a Precursor Gas in a Catalytic Chemical Vapor Deposition Process
JM Stevenson, E Ampong, Y Shi - The Journal of Physical …, 2023 - ACS Publications
The reaction chemistry of 1, 1, 3, 3-tetramethyldisilazane (TMDSZ) in catalytic chemical
vapor deposition (Cat-CVD), including its primary decomposition on a heated W filament …
vapor deposition (Cat-CVD), including its primary decomposition on a heated W filament …
Mechanism of the thermal decomposition of tetramethylsilane: a flash pyrolysis vacuum ultraviolet photoionization time-of-flight mass spectrometry and density …
X Liu, J Zhang, A Vazquez, D Wang, S Li - … Chemistry Chemical Physics, 2018 - pubs.rsc.org
The thermal decomposition of tetramethylsilane (TMS) was studied over the temperature
range of 298–1450 K by combining flash pyrolysis vacuum ultraviolet photoionization time-of …
range of 298–1450 K by combining flash pyrolysis vacuum ultraviolet photoionization time-of …
Unraveling the complex chemistry using dimethylsilane as a precursor gas in hot wire chemical vapor deposition
R Toukabri, Y Shi - Physical Chemistry Chemical Physics, 2014 - pubs.rsc.org
The gas-phase reaction chemistry when using dimethylsilane (DMS) as a source gas in a
hot-wire chemical vapor deposition (CVD) process has been studied in this work. The …
hot-wire chemical vapor deposition (CVD) process has been studied in this work. The …
From germolane to germylenes: a theoretical DFT study of thermal decomposition pathways and reactivity
I Badran - Journal of Coordination Chemistry, 2024 - Taylor & Francis
This study addresses the often-overlooked chemistry of germanium compared to the
extensively researched carbon and silicon. Using advanced DFT methods, we investigated …
extensively researched carbon and silicon. Using advanced DFT methods, we investigated …
Formation of methyl radicals from decomposition of methyl-substituted silanes over tungsten and tantalum filament surfaces
R Toukabri, N Alkadhi, YJ Shi - The Journal of Physical Chemistry …, 2013 - ACS Publications
The formation of methyl radical from the decomposition of four methyl-substituted silane
molecules, including monomethylsilane (MMS), dimethylsilane (DMS), trimethylsilane …
molecules, including monomethylsilane (MMS), dimethylsilane (DMS), trimethylsilane …
Mechanistic study of thermal decomposition of hexamethyldisilane by flash pyrolysis vacuum ultraviolet photoionization time-of-flight mass spectrometry and density …
X Liu, J Zhang, A Vazquez, D Wang… - The Journal of Physical …, 2019 - ACS Publications
Thermal decomposition of hexamethyldisilane (HMDS) was studied from room temperature
to 1310 K using flash pyrolysis vacuum ultraviolet single-photon ionization time-of-flight …
to 1310 K using flash pyrolysis vacuum ultraviolet single-photon ionization time-of-flight …
Theoretical Study on the Decomposition Kinetics and Thermochemistry of Tetramethyldisilazane and Hexamethyldisilazane─ Formation of Silanimine and Silene …
A Yadav, J Stevenson, E Ampong… - The Journal of Physical …, 2022 - ACS Publications
The gas-phase decomposition kinetics and thermochemistry of 1, 1, 1, 3, 3, 3-
hexamethyldisilazane (HMDSZ) and 1, 1, 3, 3-tetramethyldisilazane (TMDSZ), two potential …
hexamethyldisilazane (HMDSZ) and 1, 1, 3, 3-tetramethyldisilazane (TMDSZ), two potential …
A kinetic study of the gas-phase reactions of 1-methylsilacyclobutane in hot wire chemical vapor deposition
The reaction kinetics of the decomposition of 1-methylsilacyclobutane (MSCB) in a hot wire
chemical vapor deposition (HWCVD) reactor was investigated. The stable reaction products …
chemical vapor deposition (HWCVD) reactor was investigated. The stable reaction products …
Dominance of silylene chemistry in the decomposition of monomethylsilane in the presence of a heated metal filament
R Toukabri, YJ Shi - The Journal of Physical Chemistry A, 2014 - ACS Publications
The gas-phase reaction chemistry of the decomposition of monomethylsilane (MMS) has
been studied in the presence of a heated metal filament in a hot-wire chemical vapor …
been studied in the presence of a heated metal filament in a hot-wire chemical vapor …