An electric-probe method for the diagnostics of electron-distribution functions (EDFs) in
plasmas is reviewed with emphasis on receiving reliable results while taking into account …

Electron energy distribution functions (EEDFs) have been measured in low-pressure
capacitive RF discharges over a wide range of well defined (geometrically and electrically) …

Light emission from silicon based on quantum confinement in nanoscale structures has
sparked intense research into this field ever since its discovery about 15 years ago. A barrier …

The electron energy distribution function measured with improved energy resolution
revealed a large number (≊ 90%) of low-energy electrons having an abnormally low …

Plasma and beam diagnostic methods for high-current-density negative ion sources are
reviewed. The pulse laser–induced photodetachment method was widely used to measure …

A Langmuir probe for the study of high-density RF discharges has been developed and
tested in a helicon discharge in which the RF potential (approximately= 100 V) is much …

Particle-in-cell (PIC) simulations are used to study the structure of radio-frequency (RF) glow
discharges in helium between parallel-plate electrodes. The authors have examined a …

Plasma processing is one of the key technologies worldwide, especially using nonthermal,
low-temperature plasmas. Recently, the situation is characterized by the fast-growing …

A retarding field analyser has been used to examine ion and electron energies at the
grounded electrode of a capacitively coupled RF discharge in argon. The onset of collisional …

Measurements of charged‐particle concentrations and the electron energy distribution
function (EEDF) have been made in Ar and SF6 glow discharges using a tuned Langmuir …