Role of nanoimprint lithography for strongly miniaturized optical spectrometers

H Hillmer, C Woidt, A Istock, A Kobylinskiy, DT Nguyen… - Nanomaterials, 2021 - mdpi.com
Optical spectrometers and sensors have gained enormous importance in metrology and
information technology, frequently involving the question of size, resolution, sensitivity …

Miniaturized interferometric sensors with spectral tunability for optical fiber technology—A comparison of size requirements, performance, and new concepts

H Hillmer, C Woidt, A Kobylinskiy, M Kraus, A Istock… - Photonics, 2021 - mdpi.com
Optical interferometric sensors have acquired significant importance in metrology and
information technology, especially in terms of their potential application in launching size …

3D nanoimprint for NIR Fabry-Pérot filter arrays: fabrication, characterization and comparison of different cavity designs

DT Nguyen, M Ababtain, I Memon, A Ullah, A Istock… - Applied …, 2016 - Springer
We report on the fabrication of miniaturized NIR spectrometers based on arrays of multiple
Fabry-Pérot (FP) filters. The various cavities of different height are fabricated via a single …

Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry–Pérot filter array with 3D nanoimprinted cavities

A Ullah, H Wilke, I Memon, Y Shen… - Journal of …, 2015 - iopscience.iop.org
Miniaturized spectrometers can be implemented using Fabry–Pérot (FP) filter arrays. Such
filters are defined by two parallel mirrors with a resonance cavity in between. For high optical …

3D nanoimprinted Fabry–Pérot filter arrays and methodologies for optical characterization

HH Mai, A Albrecht, C Woidt, X Wang, V Daneker… - Applied Physics B, 2012 - Springer
Fabry–Pérot (FP) filter arrays fabricated by high-resolution three dimensional (3D)
NanoImprint technology are presented. A fabrication process to implement 3D templates …

Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers

I Memon, Y Shen, A Khan, C Woidt, H Hillmer - Applied Nanoscience, 2016 - Springer
Miniaturized optical spectrometers can be implemented by an array of Fabry–Pérot (FP)
filters. FP filters are composed of two highly reflecting parallel mirrors and a resonance …

[PDF][PDF] Fabrication and characterization of efficient optical filter arrays implemented by 3D nanoimprint

I Memon - 2016 - kobra.uni-kassel.de
Optical filter arrays for high quality spectroscopic applications in the visible (VIS) range are
studied in this work. The optical filters, implemented as Fabry-Pérot (FP) filters for high …

[PDF][PDF] 3D nanoimprint technology for NIR Fabry-Pérot filter arrays

DT Nguyen - 2016 - kobra.uni-kassel.de
The fabrication of miniaturized NIR spectrometers based on arrays of multiple Fabry-Pérot
(FP) filter are reported within this thesis work. Today, the low-cost patterning of …

[引用][C] Substrate Conformal Imprint Lithography als innovatives Verfahren zur Herstellung von Nanospektrometern im sichtbaren Spektralbereich

A Albrecht - 2012

[引用][C] Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared …

A Ullah - 2015