Preimplantation genetic diagnosis

K Sermon, A Van Steirteghem, I Liebaers - The Lancet, 2004 - thelancet.com
Preimplantation genetic diagnosis (PGD) was introduced at the beginning of the 1990s as
an alternative to prenatal diagnosis, to prevent termination of pregnancy in couples with a …

Review of polymer MEMS micromachining

BJ Kim, E Meng - Journal of Micromechanics and …, 2015 - iopscience.iop.org
The development of polymer micromachining technologies that complement traditional
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …

Microneedle devices and production thereof

JH Park, MR Prausnitz - US Patent 9,302,903, 2016 - Google Patents
Microneedle devices and methods of manufacture are pro vided for transport of molecules or
energy across or into biological barriers, such as skin. The device can comprise one or more …

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H Lorenz, M Despont, N Fahrni, J Brugger… - Sensors and Actuators A …, 1998 - Elsevier
Detailed investigations of the limits of a new negative-tone near-UV resist (IBM SU-8) have
been performed. SU-8 is an epoxy-based resist designed specifically for ultrathick, high …

Surface-tension-driven microactuation based on continuous electrowetting

J Lee, CJ Kim - Journal of Microelectromechanical Systems, 2000 - ieeexplore.ieee.org
This paper describes the first microelectromechanical systems (MEMS) demonstration
device that adopts surface tension as the driving force. A liquid-metal droplet can be driven …

A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist

CH Lin, GB Lee, BW Chang… - … of Micromechanics and …, 2002 - iopscience.iop.org
In this paper we describe a new process for fabricating ultra-thick microfluidic devices
utilizing SU-8 50 negative photoresist (PR) by standard UV lithography. Instead of using a …

Recent developments in the use of two‐photon polymerization in precise 2D and 3D microfabrications

KS Lee, DY Yang, SH Park… - Polymers for advanced …, 2006 - Wiley Online Library
The use of two‐photon polymerization (TPP) initiated by a photosensitizer's non‐linear two‐
photon absorption in two‐and three‐dimensional (2D and 3D) microfabrications for various …

3D microfabrication by combining microstereolithography and thick resist UV lithography

A Bertsch, H Lorenz, P Renaud - Sensors and Actuators A: Physical, 1999 - Elsevier
A new approach for the realization of true 3D polymer structures is presented in this paper. It
consists in adding, in a post-processing microstereolithography step, 3D polymer …

Mechanical characterization of a new high-aspect-ratio near UV-photoresist

H Lorenz, M Laudon, P Renaud - Microelectronic engineering, 1998 - Elsevier
Characterization of the mechanical and thermal properties of the high-aspect-ratio, negative,
UV resist, SU-8 has been carried out. This resist allows for a broad range of thicknesses to …

Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding

FJ Blanco, M Agirregabiria, J Garcia… - Journal of …, 2004 - iopscience.iop.org
This paper describes a novel fabrication method for the manufacture of three-dimensional
(3D) interconnected microchannels. The fabrication is based on a full wafer polymer …