Virtual metrology (VM) is an important technology in semiconductor manufacturing that
enhances process control, reduces costs, and improves quality. However, as processes …

In-line metrology provides critical information for feedback and feedforward process control.
In high-volume manufacturing, the fundamental question is: how fast, how frequent, and how …

Virtual metrology (VM) plays a pivotal role in enhancing productivity, improving quality, and
reducing maintenance costs in semiconductor manufacturing by replacing traditional …