Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

Titanium dioxide thin films by atomic layer deposition: A review

JP Niemelä, G Marin, M Karppinen - Semiconductor science and …, 2017 - iopscience.iop.org
Within its rich phase diagram titanium dioxide is a truly multifunctional material with a
property palette that has been shown to span from dielectric to transparent-conducting …

Atomic Layer Deposition of High‐k Oxides of the Group 4 Metals for Memory Applications

J Niinistö, K Kukli, M Heikkilä, M Ritala… - Advanced …, 2009 - Wiley Online Library
This paper reviews several high‐k ALD processes potentially applicable to the production of
capacitors, concentrating on very recent developments. A list of the dielectric materials …

A review on hybrid nanolaminate materials synthesized by deposition techniques for energy storage applications

J Azadmanjiri, CC Berndt, J Wang, A Kapoor… - Journal of Materials …, 2014 - pubs.rsc.org
Nanostructured materials such as nanocomposites and nanolaminates are currently of
intense interest in modern materials research. Nanolaminate materials are fully dense, ultra …

Maxwell–Wagner Relaxation-Driven High Dielectric Constant in Al2O3/TiO2 Nanolaminates Grown by Pulsed Laser Deposition

PS Padhi, SK Rai, H Srivastava… - … Applied Materials & …, 2022 - ACS Publications
Multilayer nanolaminates (NLs) of alternate ultrathin sublayers of Al2O3 and TiO2 (ATA) with
the thickness ranging∼ 2 to 0.5 nm were fabricated by optimized pulsed laser deposition …

Carrier-Selective NiO/Si and TiO2/Si Contacts for Silicon Heterojunction Solar Cells

H Imran, TM Abdolkader, NZ Butt - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
Carrier-selective contacts based on thin oxides of nickel and titanium are computationally
investigated for heterojunction silicon solar cells. Replacing the standard amorphous/c-Si …

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

OME Ylivaara, L Kilpi, X Liu, S Sintonen, S Ali… - Journal of Vacuum …, 2017 - pubs.aip.org
Atomic layer deposition (ALD) is based on self-limiting surface reactions. This and cyclic
process enable the growth of conformal thin films with precise thickness control and sharp …

Small polaron hopping and tunneling transport in Maxwell–Wagner relaxation dominated Al2O3/TiO2 subnanometric laminates

PS Padhi, SK Rai, K Vijay, H Srivastava… - Applied Physics …, 2024 - pubs.aip.org
Maxwell–Wagner relaxation dominated Al 2 O 3/TiO 2 nanolaminates (ATA NLs) have
recently demonstrated their potential for high-density energy storage applications. In this …

Influence of the Al2O3 partial-monolayer number on the crystallization mechanism of TiO2 in ALD TiO2/Al2O3 nanolaminates and its impact on the material properties

GE Testoni, W Chiappim, RS Pessoa… - Journal of Physics D …, 2016 - iopscience.iop.org
Abstract TiO 2/Al 2 O 3 nanolaminates are being investigated to obtain unique materials with
chemical, physical, optical, electrical and mechanical properties for a broad range of …

Chain‐Like Semiconductive Fillers for Dielectric Enhancement and Loss Reduction of Polymer Composites

X Wu, A Karlin, V Beilin, GE Shter… - Advanced …, 2024 - Wiley Online Library
Dielectric loss is a crucial factor in determining the long‐term endurance for security and
energy loss of dielectric composites. Here, chain‐like semiconductive fibers of titanium …