Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

Laser scanning microscopes can be miniaturized for in vivo imaging by substituting optical
microelectromechanical system (MEMS) devices in place of larger components. The …

A high-speed large-amplitude piezoelectric varifocal MEMS micromirror is reported. The
mirror is capable of both quasistatic and resonant actuation. In quasi-static mode, the shape …

As crucial components within optical instruments, focusing systems enables precise
movement of optical elements through high-resolution, high-precision mechanisms. These …

A confocal laser displacement sensor using a micro-machined varifocal mirror is reported.
The focal length modulation is a key function of the confocal sensor. The mechanism of the …

Adaptive optical (AO) components play an important role in numerous optical applications,
from astronomical telescopes to microscope imaging systems. For most of these AO …

We report on a concept of a benchtop microscope for routine applications. This concept
system transfers key features of a high-end laser scanning microscope to a dedicated …

We present a new apparatus for active compensation of wavefront aberrations by
controllable heating of a lens using a film heater matrix. The annular electric film heater …

We present the evolution of initial imaging experiments and micro-electro-mechanical
systems mirrors toward a commercialized product. Feasibility of 10-mm-diameter …

The “MEMS-in-the-lens” active lens for a laser scanning microscope comprises a high
numerical aperture front element, a 3D+ MOEMS beam scanner and a collimating back lens …