F Hong, R Blaikie - Advanced Optical Materials, 2019 - Wiley Online Library
Plasmonic lithography has received extensive attention as both a potential candidate for next generation lithography and as an interesting testbed to test the fundamental resolution …
Y Xiong, Z Liu, X Zhang - Applied Physics Letters, 2009 - pubs.aip.org
We propose that a hyperlens can be used for photolithography to generate deep subwavelength arbitrary patterns from diffraction-limited masks. Numerical simulation shows …
Y Xiong, Z Liu, X Zhang - Applied physics letters, 2008 - pubs.aip.org
We utilize a metal-dielectric multilayer structure to generate deep-subwavelength one- dimensional and two-dimensional periodic patterns with diffraction-limited masks. The …
Recently a new structure showing a super-enhanced transmission [Optics Commun. 209, 17– 22 (2002); Phys. Rev. B, 67, 155314,(2003)] has been proposed. The origin of this …
Generation of interference patterns of the evanescent electromagnetic waves with significantly subwavelength period using guided-mode resonant gratings is studied. The …
X Guo, J Du, Y Guo, J Yao - Optics letters, 2006 - opg.optica.org
Large-area surface-plasmon polariton (SPP) interference lithography is presented, which uses an attenuated total reflection-coupling mode to excite the interference of the SPPs. The …
The generation of interference patterns of evanescent electromagnetic waves with an essentially subwavelength period using dielectric waveguide diffraction gratings is …
Nanophotonics deals with the diffraction of light from objects with nanoscale features. This book addresses cutting-edge problems in the field of nanophotonics as well as a wide …
RJ Blaikie, DOS Melville - Journal of Optics A: Pure and Applied …, 2005 - iopscience.iop.org
Near-field imaging through planar silver lenses has been demonstrated using a modified conformal-mask optical lithography arrangement. Dense feature resolution down to 250 nm …