This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

The disk resonator gyroscope is an attractive candidate for high-performance MEMS
gyroscopes. This gyroscope consists of a sensor and readout electronics, and the …

In this paper, we report on the design, fabrication, and characterization of an in-plane mode-
matched tuning-fork gyroscope (M 2-TFG). The M 2-TFG uses two high-quality-factor (Q) …

Predicting thermoelastic damping (TED) is crucial in the design of high Q micro-electro-
mechanical systems (MEMS) resonators. In the past, some analytical models have been …

Accurate determination of thermoelastic damping (TED) can be regarded as a crucial
component in the design and optimization of microplate resonators with high quality factors …

Accurate determination of thermoelastic damping (TED) is very challenging in the design of
micro-resonators. Microrings are widely used in many micro-resonators. In the past, to model …

In this paper, a thermal-energy method is presented for calculating thermoelastic damping in
micromechanical resonators. In this method, thermoelastic damping is interpreted as the …

Predicting thermoelastic damping (TED) is crucial in the design of high Q micromechanical
resonators. Circular plates are common elements in the microresonators. In the past, some …

Damping asymmetry is one of the most important factors that determines the performance of
Coriolis Vibratory Gyroscope. In this paper, a novel damping tuning method for the resonator …