Monomer methylmethacrylate (MMA) incorporated hybrid low-k thin films
BN Joshi, AM Mahajan - Electronic Materials Letters, 2013 - Springer
Low-dielectric-constant hybrid thin films were deposited by sol-gel spin coating technique,
using methyl methacrylate and tetraethyl orthosilicate as organic and inorganic precursors …
using methyl methacrylate and tetraethyl orthosilicate as organic and inorganic precursors …
[PDF][PDF] Untersuchungen zur flammenpyrolytischen Abscheidung silikatischer Schichten mit definierter Porosität und Funktionalisierung
BSM Kretzschmar - 2020 - d-nb.info
In this work, the generation of defined porous silicon oxide layers as well as a
functionalization of the porous matrix by subsequent coating with manganese oxide or …
functionalization of the porous matrix by subsequent coating with manganese oxide or …