Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

Diabetes mellitus is a lifelong disease and the 7th leading cause of death worldwide.
Hyperglycemia is the major hallmark of this disease that causes many clinical complications …

In this paper, a modification to the eigenmode operation of resonant gyroscopes is
introduced. The multi-coefficient eigenmode operation can improve cross-mode isolation …

The olfactory sensory system of Drosophila has several advantages, including low power
consumption, high rapidity and high accuracy. Here, we present a biomimetic intelligent …

Typical process technologies for MEMS device manufacturing include wet etching, dry
etching, sacrificial layer technology, bonding, and SOI with cavity. Wet and dry etching …

A 3D integration scheme for integrating a state-of-the-art CMOS IC with an arbitrary
MEMS/sensor chip is reported. The integration scheme consists of a CMOS IC and a MEMS …

This paper presents a novel CMOS integrated capacitive pressure sensor, fabricated in
silicon-germanium microelectromechanical systems (SiGeMEMS) process, with the sensor …

Microelectromechanical systems (MEMS) research has, until recently, focused mainly on the
engineering process, resulting in interesting products and a growing market. To fully realize …

MEMS research has until recently focused mainly on the engineering process, resulting in
interesting products and a growing market. To fully realize the promise of MEMS, the next …

Technologies that enable integration of microelectromechanical systems (MEMS)(and
sensor) chip with a complementary metal-oxide semiconductor (CMOS) integrated circuit …