There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

In recent years, there has been a growing desire to monitor and control harmful substances
arising from industrial processes that impact upon our health and quality of life. This has led …

As the world is going through an existential global health crisis, ie, the outbreak of novel
coronavirus-caused respiratory disease (Covid-19), the healthcare systems of all the …

This article presents a bidirectional thermoresistive micro calorimetric flow (TMCF) sensor
implemented by a 0.18-μ m complementary metal–oxide–semiconductor …

A general 1-D model was presented to predict the characteristics of CMOS thermoresistive
micro calorimetric flow (TMCF) sensor with two types of packaging, ie, open-space type and …

This paper presents a sensing system for the real-time monitoring of human respiration. The
system is equipped with a fast response thermoresistive micro calorimetric flow (TMCF) …

Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow
sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas …

The accurate perception of multiple flight parameters, such as the angle of attack, angle of
sideslip, and airflow velocity, is essential for the flight control of micro air vehicles, which …

In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor
model for moist airflow with the temperature-dependent thermophysical properties. The 1D …

This article presents a 3-D integrated molybdenum (Mo) thermoresistive microcalorimetric
flow sensor in a 0.18-μm CMOS MEMS technology. The sensor consists of a MEMS structure …