The present state of high-resolution displacement measuring interferometry is reviewed.
Factors which determine the accuracy, linearity and repeatability of nanometre-scale …

In this paper, we report the development of a simple but precise piezoelectric spectrometer
using a Michelson–Morley interferometer. The measurement system has been developed to …

We present a new digital phase measuring scheme for optical heterodyne interferometry,
which provides high measurable velocity up to 6 m s-1 with a fine displacement resolution of …

We present a new displacement measuring technique with simplicity, robustness, high
sensitivity and wide measurement range. A set of a frequency shifter and a voltage …

He–Ne heterodyne laser interferometers are widely used as standard tools for displacement
metrology to produce high-resolution measurements. However, such systems use specially …

A method of phase difference determination in interferometry is presented. In this method,
the phase difference between two interferograms is determined by fringe pattern matching …

An algorithm of phase-shifted image matching for the measurement of displacement from
interferometric images is presented. The algorithm is capable of detecting the displacements …

We describe an instrument called a friction force scanner (FFS) able to perform calibrated
measurements of the behaviour of mechanical junctions with more than four orders of …

The vibration measurement technique using a heterodyne laser interferometer is addressed
in this article. A Zeeman-stabilized He–Ne laser is used as the light source. The frequency …

In resonant atomic force microscopy (AFMR) the calibration of the tip–sample relative
displacement remains a major problem. Commonly used PZT piezoceramics exhibit a …