Correlations between physical properties linking film quality with wet etch rate (WER), one of
the leading figures of merit, in plasma-enhanced atomic layer deposition (PEALD) grown …

Plasma beam polishing has emerged as an innovative alternative to conventional metal
finishing techniques. However, the precision machining ability of plasma arc encounters …

Previously, we reported an optimization algorithm based on a plasma diagnostic model for
optical emission spectroscopic (OES) measurements. In this study, we improved the …

The adoption of high energy beam in the area of metallic surface polishing is a novel
technique to produce glossy surfaces. In particularly, plasma beam finishing is emerging as …

The distribution of electron temperature (Te), electron density (Ne) in a remote N2 plasma
was studied with the help of emission spectroscopy, Langmuir probe diagnostic techniques …

Magnetic-pole-enhanced inductively coupled plasmas (MaPE-ICPs), in comparison with the
conventional ICPs, operate in two modes (E and H) dependent upon the power coupling …

The atmospheric‐pressure plasma needle is a promising source that can be used efficiently
for different industrial applications. A radio frequency (RF)(13.56 MHz) generator was used …

Optical emission spectroscopy was used to study the properties of the inductively coupled
plasma of SF 6/Ar gas mixture. In particular, the effect of RF power supplied to the discharge …

The development and evaluation of a non-invasive optical diagnostic that uses the spectrum
of light emitted by the plasma to determine non-Maxwellian electron energy distribution …

В процессе исследования были получены данные о структурных и функциональных
свойствах стали 40х13 после процесса высокочастотного азотирования в Ar+ N2+ H2 …