Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

The development of a high-performance three-axis serial-kinematic nanopositioning stage is
presented. The stage is designed for high-bandwidth applications that include video-rate …

A novel scan trajectory for high-speed scanning probe microscopy is presented in which the
probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by …

In this study, the actuator load force of a nanopositioning stage is utilized as a feedback
variable to achieve both tracking and damping. The transfer function from the applied …

This paper demonstrates a simple second-order controller that eliminates scan-induced
oscillation and provides integral tracking action. The controller can be retrofitted to any …

Iterative learning control (ILC) for a galvanometer scanner is proposed to achieve high
speed, linear, and accurate bidirectional scanning for scanning laser microscopy. A …

Many popular modes of scanning probe microscopy require a vertical feedback system to
regulate the tip-sample interaction. Examples include constant-current scanning tunneling …

This paper presents a dual-stage approach to nanopositioning in which the tradeoff between
the scanner speed and range is addressed by combining a slow, large-range scanner with a …

In scan-based 3-D systems, the achievable measurement time is strongly restrained by the
moving mass. This limitation can be relaxed, by scanning the optical path instead of moving …

A major disadvantage of scanning probe microscopy is the slow speed of image acquisition,
typically less than one image per minute. This paper describes three techniques that can be …