Influence of the pressure range on temperature coefficient of resistivity (TCR) for polysilicon piezoresistive MEMS pressure sensor
Sensitivity with respect to physical change of any type of sensor depends upon structure of
the sensor and sensing material. If sensor is sensitive with more than single physical change …
the sensor and sensing material. If sensor is sensitive with more than single physical change …
Analytical study of graphene as a novel piezoresistive material for MEMS pressure sensor application
The one-atom thick layer of carbon has been investigated with its unique exclusive property
such as high thermal conductivity due to the high velocity of electron and exceptional …
such as high thermal conductivity due to the high velocity of electron and exceptional …
Simulation Studies on Packaging of Piezo MEMS Acoustic Sensor for Underwater Applications
M Kathiresan, E Varadarajan, R Ramesh… - 2021 International …, 2021 - ieeexplore.ieee.org
Demand for miniature hydrophone sensors is ever increasing due to the advent of smart
miniature autonomous underwater vehicles. Piezo micro-electro-mechanical system …
miniature autonomous underwater vehicles. Piezo micro-electro-mechanical system …
State of Art for Virtual Fabrication of Piezoresistive MEMS Pressure Sensor
PA Alvi - Electrical and Electronic Devices, Circuits and …, 2021 - taylorfrancis.com
Numerous challenges are associated with the fabrication process of the
microelectromechanical system (MEMS) pressure sensor. Selecting the best suitable …
microelectromechanical system (MEMS) pressure sensor. Selecting the best suitable …