Surface acoustic wave devices using lithium niobate on silicon carbide

S Zhang, R Lu, H Zhou, S Link, Y Yang… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
This work demonstrates a group of shear horizontal (SH0) mode resonators and filters using
lithium niobate (LiNbO3) thin films on silicon carbide (SiC). The single-crystalline X-cut …

Wideband and low-loss surface acoustic wave filter based on 15° YX-LiNbO₃/SiO₂/Si structure

R Su, J Shen, Z Lu, H Xu, Q Niu, Z Xu… - IEEE electron device …, 2021 - ieeexplore.ieee.org
With the development of the radio frequency technique, the explosive growth of transmitted
data in 5G era puts higher requirements on surface acoustic wave (SAW) filter bandwidth. In …

A1 resonators in 128° Y-cut lithium niobate with electromechanical coupling of 46.4%

R Lu, Y Yang, S Link, S Gong - Journal of …, 2020 - ieeexplore.ieee.org
In this work, we present first-order antisymmetric (A1) mode resonators in 128° Y-cut lithium
niobate (LiNbO 3) thin films with electromechanical coupling coefficients (k 2) as large as …

Transversely excited film bulk acoustic resonator using rotated YX cut lithium niobate

V Yantchev, V Plesski, B Garcia - US Patent 10,790,802, 2020 - Google Patents
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator
includes a substrate and a lithium niobate (LN) plate having front and back surfaces. The …

Transversely-excited film bulk acoustic resonators for high power applications

B Garcia, R Hammond, P Turner, N Fenzi… - US Patent …, 2020 - Google Patents
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having parallel front and …

Solidly-mounted transversely-excited film bulk acoustic resonator

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2020 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having parallel front and …

Transversely-excited film bulk acoustic resonator

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2019 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate and a piezoelectric plate having parallel front and back surfaces, the back surface …

Transversely-excited film bulk acoustic resonator

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2020 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having parallel front and …

Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate

V Plesski - US Patent 10,797,675, 2020 - Google Patents
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator
includes a substrate and a lithium niobate (LN) plate having parallel front and back surfaces …

Transversely-excited film bulk acoustic resonators with molybdenum conductors

V Plesski, B Garcia, J Koskela, P Turner - US Patent 10,826,462, 2020 - Google Patents
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …