Development trends and perspectives of future sensors and MEMS/NEMS

J Zhu, X Liu, Q Shi, T He, Z Sun, X Guo, W Liu… - Micromachines, 2019 - mdpi.com
With the fast development of the fifth-generation cellular network technology (5G), the future
sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems …

MEMS piezoelectric sensor for self-powered devices: A review

M Sawane, M Prasad - Materials Science in Semiconductor Processing, 2023 - Elsevier
The bulkiness of traditional batteries, as well as frequent charging and electronic detritus
caused by the replacement of old batteries, hinder the ability of low-powered electronic …

Piezoelectric MEMS based acoustic sensors: A review

WR Ali, M Prasad - Sensors and Actuators A: Physical, 2020 - Elsevier
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

A review of the recent applications of aluminum nitride-based piezoelectric devices

ST Haider, MA Shah, DG Lee, S Hur - Ieee Access, 2023 - ieeexplore.ieee.org
Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …

Recent trends in structures and interfaces of MEMS transducers for audio applications: A review

A Gemelli, M Tambussi, S Fusetto, A Aprile, E Moisello… - Micromachines, 2023 - mdpi.com
In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an
impressive impact in the field of acoustic transducers, allowing the development of smart …

Design and characterization of a MEMS piezoelectric acoustic sensor with the enhanced signal-to-noise ratio

A Rahaman, CH Park, B Kim - Sensors and Actuators A: Physical, 2020 - Elsevier
The signal-to-noise ratio (SNR)–governed by the sensitivity and noise–determines the
usefulness of a MEMS acoustic sensor. Low-SNR poses functional inability in a noisy …

Sound source localization by Ormia ochracea inspired low–noise piezoelectric MEMS directional microphone

A Rahaman, B Kim - Scientific reports, 2020 - nature.com
The single-tone sound source localization (SSL) by majority of fly Ormia ochracea's ears–
inspired directional microphones leaves a limited choice when an application like hearing …

Piezoelectric materials

A Behera, A Behera - Advanced Materials: An Introduction to Modern …, 2022 - Springer
This chapter describes the historical background, basic phenomenon associated with the
piezoelectric materials. Both direct and inverse piezoelectric effect has been explained with …

Microscale devices for biomimetic sound source localization: a review

A Rahaman, B Kim - Journal of Microelectromechanical …, 2021 - ieeexplore.ieee.org
Over the last decades, the sub–wavelength hearing capability of small living creatures has
been received huge attention in developing microscale biomimetic sound source …

Piezoelectric based MEMS acoustic sensor for wide frequency applications

WR Ali, M Prasad - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This work describes the development of an acoustic sensor based on piezoelectric ZnO thin
film to be utilized for aero-acoustic measurements. The design of the device was carried out …