Intelligent motion control is integral to modern cyber-physical systems. However, smart
integration of intelligent motion control with commercial and industrial systems requires …

With the growing demand for semiconductor products, the semiconductor manufacturing
industries are trying to increase their production capacities. Additional requirements and …

Accurate object positioning is critical in many industrial manufacturing applications. The
execution time and precision of the object positioning task have a significant impact on the …

The high-precision and high-speed positioning systems require position feedback with high
accuracy at a higher frequency. As reported in recent literature, high accuracy and high …

In these years of severe chip shortage, it is even more important to improve the efficiency of
chip manufacturing. As is well known, manufacturing phases rely on increasingly intelligent …

The high-speed, high-precision positioning of objects is a critical component in various
industrial manufacturing processes. The semiconductor die packaging, for instance, requires …