Y Kim, K Sangyeol, H Sato, T Shiratori… - US Patent …, 2016 - Google Patents
A trialkylsilane-based silicon precursor compound may be expressed by Si (R i) X, i= 1-3,
where each of “R 1”,“R 2”, and “R 3” is a hydrogen or an alkyl having 1-5 carbon (s), all of “R …