Scanning probe lithography on calixarene towards single-digit nanometer fabrication
M Kaestner, IW Rangelow - International Journal of Extreme …, 2020 - iopscience.iop.org
Cost effective patterning based on scanning probe nanolithography (SPL) has the potential
for electronic and optical nano-device manufacturing and other nanotechnological …
for electronic and optical nano-device manufacturing and other nanotechnological …
Line edge roughness metrology software
A line edge roughness analysis software is developed based on the Canny edge detection
algorithm with a double threshold, where threshold values are obtained by Otsu's method …
algorithm with a double threshold, where threshold values are obtained by Otsu's method …
Nanoscale lift-off process using field emission scanning probe lithography
Nanoelectronics manufacturing requires an ongoing development of lithography and also
encompasses some “unconventional” methods. In this context, the authors use field …
encompasses some “unconventional” methods. In this context, the authors use field …
[图书][B] Scanning Probe Lithography: Fundamentals, Materials, and Applications
YK Ryu, JM Rodrigo - 2022 - taylorfrancis.com
The most complete book available on scanning probe lithography (SPL), this work details
the modalities, mechanisms, and current technologies, applications, and materials on which …
the modalities, mechanisms, and current technologies, applications, and materials on which …
[PDF][PDF] ArF scanner lithography for InP photonic integrated circuit fabrication
J Bolk - 2020 - research.tue.nl
Over the past few decades, lithography has defined the capability of advanced electronic
integrated circuit fabrication. It determines the minimum feature size that can be printed …
integrated circuit fabrication. It determines the minimum feature size that can be printed …
A complete set of logic gates with an identical single-stage structure based on periodic nature of single-electron devices
MJ Sharifi, M Ahmadian - Journal of Computational Electronics, 2021 - Springer
In this paper, a new method for implementing all two-input logic gates on an identical single-
stage structure is proposed. We have used unique characteristics of single-electron …
stage structure is proposed. We have used unique characteristics of single-electron …
Scanning probe lithography
R Garcia - Nanofabrication: Nanolithography techniques and …, 2020 - iopscience.iop.org
This chapter describes the principles of scanning probe lithography (SPL) and some of its
applications in materials science and nanotechnology. The focus is placed on selected SPL …
applications in materials science and nanotechnology. The focus is placed on selected SPL …