Hard carbon coatings hold the key to improved performance for many types of products.
However the achievement of these improvements requires the selection of the appropriate …

The chemical reactions and physical processes which occur at the surface of hydrocarbon
films during deposition from low-temperature hydrocarbon plasmas are reviewed. Special …

A summary is given of different elementary processes influencing the thermal balance and
energetic conditions of substrate surfaces during plasma processing. The discussed …

Low‐pressure plasma co‐polymerisation of binary gas mixtures of ethylene and ammonia
was investigated in order to deposit N‐rich plasma polymer coatings for biomedical …

Plasma processing is one of the key technologies worldwide, especially using nonthermal,
low-temperature plasmas. Recently, the situation is characterized by the fast-growing …

A one-dimensional (1D) model for a methane rf plasma consisting of 20 species (neutrals,
radicals, ions, and electrons) is presented. The equations solved are the particle balances …

Hydrocarbon films exhibit a wide range of applications due to their extraordinary properties
such as hardness, chemical inertness, or infrared transparency. 1–3 These films are usually …

The growth of thin films from low-temperature plasmas plays an important role in many
applications such as optical or wear-resistant layers or for the fabrication of electronic …

Amorphous hydrogenated carbon films (aC: H) are usually deposited in low-temperature
plasmas from a hydrocarbon precursor gas. The feed gas is dissociated and ionized in the …

A surface model is presented for the etching of silicon (Si) and silicon dioxide (SiO 2) in
fluorocarbon plasmas. Etching and deposition are accounted for using a generalized …