Atomic layer deposition of stable 2D materials

W Hao, C Marichy, C Journet - 2D Materials, 2018 - iopscience.iop.org
Following the graphene isolation, strong interest in two dimensional (2D) materials has been
driven by their outstanding properties. Their typical intrinsic structure, including strong in …

Catalyst design with atomic layer deposition

BJ O'Neill, DHK Jackson, J Lee, C Canlas, PC Stair… - Acs …, 2015 - ACS Publications
Atomic layer deposition (ALD) has emerged as an interesting tool for the atomically precise
design and synthesis of catalytic materials. Herein, we discuss examples in which the atomic …

Atomic layer deposition of two-dimensional layered materials: processes, growth mechanisms, and characteristics

J Cai, X Han, X Wang, X Meng - Matter, 2020 - cell.com
Since the discovery of graphene, there has been an ever-increasing interest in two-
dimensional (2D) layered materials with exceptional properties. To this end, a variety of …

Wafer-scale growth of MoS 2 thin films by atomic layer deposition

JJ Pyeon, SH Kim, DS Jeong, SH Baek, CY Kang… - Nanoscale, 2016 - pubs.rsc.org
The wafer-scale synthesis of MoS2 layers with precise thickness controllability and excellent
uniformity is essential for their application in the nanoelectronics industry. Here, we …

Advances in scalable gas-phase manufacturing and processing of nanostructured solids: A review

S Salameh, J Gomez-Hernandez, A Goulas, H Van Bui… - Particuology, 2017 - Elsevier
Although the gas-phase production of nanostructured solids has already been carried out in
industry for decades, only in recent years has research interest in this topic begun to …

Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)6 and NH3 and Its Diffusion Barrier Application

TH Kim, DK Nandi, R Ramesh, SM Han… - Chemistry of …, 2019 - ACS Publications
Deposition providing precise control of the film thickness, low deposition temperature, and
noncorrosive byproducts is essential for the efficient fabrication of barrier layers in …

Tuning acid–base properties using Mg–Al oxide atomic layer deposition

DHK Jackson, BJ O'Neill, J Lee… - … Applied Materials & …, 2015 - ACS Publications
Atomic layer deposition (ALD) was used to coat γ-Al2O3 particles with oxide films of varying
Mg/Al atomic ratios, which resulted in systematic variation of the acid and base site areal …

[HTML][HTML] Plasma-enhanced atomic layer deposition of WO3-SiO2 films using a heteronuclear precursor

K Mullapudi, KEK Holden, JL Peterson… - Journal of Vacuum …, 2023 - pubs.aip.org
Tungsten oxide–silicon dioxide (WO x–SiO y) composite thin films were deposited for the
first time via the remote oxygen plasma-enhanced atomic layer deposition (ALD) process …

Electrochemically active dispersed tungsten oxides obtained from tungsten hexacarbonyl in supercritical carbon dioxide

AY Nikolaev, AA Khokhlov, EE Levin… - Journal of Materials …, 2019 - Springer
Electrochemically active nanocrystalline tungsten oxide was synthesized in supercritical
carbon dioxide from tungsten hexacarbonyl at 150° C and 400 bar in the presence of …