Design and applications of MEMS flow sensors: A review

F Ejeian, S Azadi, A Razmjou, Y Orooji… - Sensors and Actuators A …, 2019 - Elsevier
There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

MEMS sensors for flow separation detection

Z Abbas, M Mansoor, M Habib, Z Mehmood - Microsystem Technologies, 2023 - Springer
Flow separation is a critical aerodynamic phenomenon impacting flight envelope of various
flying objects. Its efficient detection and subsequent control are vital for enhanced …

High temperature gradient calorimetric wall shear stress micro-sensor for flow separation detection

C Ghouila-Houri, Q Gallas, E Garnier, A Merlen… - Sensors and Actuators A …, 2017 - Elsevier
The paper describes and discusses the design and testing of an efficient and high-sensitivity
calorimetric thermal sensor developed for bi-directional wall shear stress measurements in …

Passive flow velocity and direction measurement system under interference environment based on the turbulent boundary layer pressure fluctuation field

Y Wang, Q Li, D Shang, R Tang - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
To realize flow field monitoring without interference to the flow field, this study proposes a
new passive flow velocity and flow direction measurement system. This method utilizes …

Unsteady flows measurements using a calorimetric wall shear stress micro-sensor

C Ghouila-Houri, A Talbi, R Viard, Q Gallas… - Experiments in …, 2019 - Springer
A microscale low power high temperature gradient calorimetric (HTGC) sensor measuring
both mean and fluctuating bidirectional wall shear stress is presented. The micromachined …

A novel two-dimensional high SNR MEMS shear stress sensor for ocean turbulence

C Hao, W Zhang, B Wu, Z Zhang, J He, R Wang… - Sensors and Actuators A …, 2021 - Elsevier
Ocean turbulence observation is essentially important to the study of microscopic structure
and macroscopic motion. The shear probe sensor is one of the effective ways for turbulence …

MEMS high temperature gradient sensor for skin-friction measurements in highly turbulent flows

C Ghouila-Houri, A Talbi, R Viard, Q Gallas… - IEEE Sensors …, 2020 - ieeexplore.ieee.org
This paper presents and discusses the results obtained with a MEMS (Micro-Electro-
Mechanical System) high temperature gradient sensor for time-averaged and fluctuating …

High temperature gradient nanogap-Pirani micro-sensor with maximum sensitivity around atmospheric pressure

C Ghouila-Houri, A Talbi, R Viard… - Applied Physics …, 2017 - pubs.aip.org
This letter describes and discusses the design and testing of an efficient nanogap Pirani
micro-sensor for pressure measurements in a wide range with a maximum sensitivity around …

An internal miniature diversion channel-integrated piezoelectric airflow sensor

P Liu, J Hu - Smart Materials and Structures, 2020 - iopscience.iop.org
In this note, we propose and develop a piezoelectric airflow sensor with a novel
configuration composed of a piezoelectric bimorph cantilever (PBC) and an internal …

High temperature gradient micro-sensors array for flow separation detection and control

C Ghouila-Houri, A Talbi, R Viard… - Smart Materials and …, 2019 - iopscience.iop.org
This paper reports the use of an array of calorimetric micro-sensors that perform bidirectional
measurement of wall shear stress, for flow separation detection and control. The sensors …