Central to future electronic device developments in diamond is the provision of smooth, low
defect density substrate materials. This review examines plasma treatments of diamond to …

Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the
art and catalog of recipes - ScienceDirect Skip to main contentSkip to article Elsevier logo …

Diamond possesses excellent physical and electronic properties, and thus various
applications that use diamond are under development. Additionally, the control of diamond …

In this Spotlight on Applications, we describe our recent progress on the fabrication of
surface-enlarged boron-doped polycrystalline diamond electrodes, and evaluate their …

The precise patterning of front-side mesas, backside vias, and selective removal of ternary
alloys are all needed for power device fabrication in the various wide bandgap (AlGaN/GaN …

In this paper we describe a process for fabricating high aspect ratio gratings in single-or
polycrystalline diamond with the high precision required by micro-optics. Nanoimprint …

Electrically conducting vertically aligned boron-doped diamond (BDD) nanostructures are
fabricated from BDD films by reactive ion etching (RIE) using Au masks. Two different …

We report the systematic studies on the fabrication of aligned, uniform, and highly dense
diamond nanostructures from diamond films of various granular structures. Self-assembled …

To exploit the exceptional properties of diamond, new high quality fabrication techniques are
needed to produce high performing devices. Etching and patterning diamond to depths …

Many promising applications of single crystal diamond and its color centers as sensor
platform and in photonics require free-standing membranes with a thickness ranging from …