This study developed a microelectromechanical systems (MEMS) doubly decoupled
gyroscope with a wide driving frequency range. The gyroscope increases the resonance …

This paper proposes a novel quartz micromachined gyroscope. The structure is designed by
using shear stress detection method which can simplify the sidewall electrodes obviously …

This paper presents a novel approach that can compensate the error resulting from interface
circuits for MEMS gyroscopes. Different from most of existing researches on gyroscopes …

This paper introduces a novel MEMS gyroscope that is capable of exciting the drive mode
differentially. The structure also decouples the drive and sense modes via an intermediate …

A four-degree-of-freedom gyroscope dynamical model is presented to improve the
performance of a tuning fork vibratory MEMS gyroscope. The effects of the driving and …

This paper introduces an electrothermally actuated resonant microgyroscope and shows
that how a thermal actuator can have a proper performance in the drive mode. In the …

This paper introduces an efficient design for a symmetrical and decoupled micromachined
gyroscope. The angular rate resolution of the gyroscope is increased by matching the …