Photoacoustic imaging has shown great potential for non-invasive high-resolution deep- tissue imaging. Minimizing the optical and acoustic paths for excitation and detection could …
Gas sensors are devices that can detect and/or discriminate gases in their surroundings. Some of these devices are based on vibrating structure covered with a coating sensitive to …
In this paper an improved analytical model of electrostatic force for capacitive micromachined ultrasonic transducer (CMUT) has been carried out. These findings are …
The study of a micro-electro-mechanical-system (MEMS) based capacitive micromachined ultrasonic transducer (CMUT) is considered. The characteristics and behavioral studies of …
The influence of fringing electric fields at the edges of the Capacitance Micromachined Ultrasonic Transducer's (CMUT's) gap and insulation layers are included into the parallel …
In this work, modeling of parasitic capacitance due to fringing field and its influence on the performance of nano-electro-mechanical-system (NEMS) capacitive micromachined …
F Yildiz, T Matsunaga, Y Haga - Micromachines, 2018 - mdpi.com
This paper presents fabrication and packaging of a capacitive micromachined ultrasonic transducer (CMUT) using anodically bondable low temperature co-fired ceramic (LTCC) …
This paper explained the dependency of collapse voltage on semiconductor device structural features (membrane diameter, membrane thickness and the vertical distance …
Abstract An immersion based Capacitive Micromachined Ultrasonic Transducer (CMUT) is modelled and investigated. Analysis on the displacement and output pressure is done using …