Electrostatic pull-in instability in MEMS/NEMS: A review
WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …
[HTML][HTML] Electrostatically actuated nanobeam-based nanoelectromechanical switches–materials solutions and operational conditions
This review summarizes relevant research in the field of electrostatically actuated nanobeam-
based nanoelectromechanical (NEM) switches. The main switch architectures and structural …
based nanoelectromechanical (NEM) switches. The main switch architectures and structural …
Utilizing mechanical adhesion force as a high contact force in a MEMS relay
SB Kim, HW Min, YB Lee, SH Kim, PK Choi… - Sensors and Actuators A …, 2021 - Elsevier
High contact force in a microelectromechanical systems (MEMS) relay is known to be the
most important factor in achieving low contact resistance. Achieving a high contact force in …
most important factor in achieving low contact resistance. Achieving a high contact force in …
An ultra-low voltage MEMS switch using stiction-recovery actuation
In this paper, an ultra-low voltage microelectromechanical system (MEMS) switch is
proposed, modeled and demonstrated. Through the introduction of torsional hinges, stiction …
proposed, modeled and demonstrated. Through the introduction of torsional hinges, stiction …
Integration of gold nanoparticle–carbon nanotube composite for enhanced contact lifetime of microelectromechanical switches with very low contact resistance
Electrical circuits require ideal switches with low power consumption for future electronic
applications. However, transistors, the most developed electrical switches available …
applications. However, transistors, the most developed electrical switches available …
Integration of a carbon nanotube network on a microelectromechanical switch for ultralong contact lifetime
Micro-/nanoelectromechanical (MEM/NEM) switches have been extensively studied to
address the limitations of transistors, such as the increased standby power consumption and …
address the limitations of transistors, such as the increased standby power consumption and …
Exploitation of the coffee-ring effect to realize mechanically enhanced inkjet-printed microelectromechanical relays with U-bar-shaped cantilevers
We report a mechanically enhanced inkjet-printed microelectromechanical (MEM) relay with
a U-bar-shaped cantilever by exploiting the coffee-ring effect. The printed cantilever shape …
a U-bar-shaped cantilever by exploiting the coffee-ring effect. The printed cantilever shape …
Investigation of the nanoparticle electrical contact lubrication in MEMS switches
A nanoparticle has been reported as a promising lubricant to increase the durability of
microelectromechanical systems (MEMS) switches, but there remains much room for …
microelectromechanical systems (MEMS) switches, but there remains much room for …
Ultra-low voltage MEMS switch using a folded hinge structure
An ultra-low voltage microelectromechanical system (MEMS) switch for low-power
integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded …
integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded …
Micro and nanoelectromechanical contact switches for logic, memory, and power applications
This chapter describes a wide range of technologies for contact-based
microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) switches …
microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) switches …