Many thin film applications are based on oxides. The optimization of the oxide properties is
an on-going process and requires a deep understanding of the deposition process. A typical …

A wide range of material treatment and nanosynthesis technologies can be significantly
enhanced by the use of a plasma-based process environment, with the benefits ranging …

We report the effect of hydrogen addition on plasma parameters of argon-oxygen magnetron
glow discharge plasma in the synthesis of H-doped TiO 2 films. The parameters of the …

An experimental study to investigate the effect of an external magnetic field on the
propagation of ion-acoustic waves (IAWs) has been carried out in hydrogen plasma …

The properties and performance of thin films deposited by plasma assisted processes are
closely related to their manufacturing techniques and processes. The objective of the current …

Выполнен краткий обзор публикаций за 2005-2014 гг. о пленках и покрытиях из
оксидов, нитридов и оксинитридов переходных металлов. Указаны основные …