The development of nanotechnology and nanomaterials has put forward higher
requirements and challenges for precision measurement or nanometer measurement …

We present an innovative ellipsometry technique called self-interferometric pupil
ellipsometry (SIPE), which integrates self-interference and pupil microscopy techniques to …

Spectroscopic ellipsometry is a widely used optical technique in both industry and research
for determining the optical properties and thickness of thin films. The effective use of …

We propose a polarized, angle-resolved spectral (PARS) reflectometry for simultaneous
thickness and refractive-index measurement of ultra-thin films in real time. This technology …

Angle-resolved ellipsometry with back focal plane imaging has been found to be of
increasing importance in recent industrial sensing by virtue of its rich information provided at …

Back focal plane (BFP) ellipsometry, which acquires the ellipsometric parameters of
reflected light at different incident and azimuthal angles through a high-NA objective lens …

Surface modification by photo grafting constitutes an interesting strategy to prepare
functional surfaces. Precision applications, however, demand quantitative methods able to …

Ellipsometry is a powerful metrology technique for characterizing the optical properties of
various materials. Channeled spectroscopic ellipsometry (CSE) has shown great promise …

Micro-ellipsometry, an on-axis optical configuration, offers submicron spatial resolution
compared to conventional ellipsometry. However, its lower precision, inaccurate system …

We propose a compact angle-resolving spectral ellipsometry. Using the structured light
generated from a digital micro-mirror device (DMD), what we believe to be a novel pattern is …