Through silicon via (TSV) defect modeling, measurement, and analysis

DH Jung, Y Kim, JJ Kim, H Kim, S Choi… - IEEE transactions on …, 2016 - ieeexplore.ieee.org
Through silicon via (TSV)-based 3-D integrated circuit has introduced the solution to
limitlessly growing demand on high system bandwidth, low power consumption, and small …

Through-silicon via fault-tolerant clock networks for 3-D ICs

CL Lung, YS Su, HH Huang, Y Shi… - IEEE Transactions on …, 2013 - ieeexplore.ieee.org
Clock network synthesis is one of the most important and challenging problems in 3-D ICs.
The clock signals have to be delivered by through-silicon vias (TSVs) to different tiers with …

Transmission Characteristics of Long-Chain Through Silicon Via-Redistribution Layer Interconnects

X Chen, X Jian, H Wang, X Lu, Y Zhang… - IEEE Transactions …, 2024 - ieeexplore.ieee.org
Current research on the transmission characteristics of through silicon via-redistribution
layer (TSV-RDL) interconnects is basically limited to the single-pair interconnect (a device …

Improving the Reliability of Through Silicon Vias: Reducing Copper Protrusion by Artificial Defect Manipulation and Annealing

WJ Choi, MJ Yoo, J Bae, JH Seo… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
Through silicon vias (TSVs) are a critical technology for manufacturing three-dimensional
stacked structure of semiconductor packages by forming holes that penetrate silicon wafers …

TSV manufacturing fault modeling and diagnosis based on multi-tone dither

Y Shang, M Tan, C Li, L Sun - Journal of Advanced Computational …, 2019 - jstage.jst.go.jp
The faults in through-silicon via (TSV) have a critical impact on the reliability and yield of a
threedimensional integrated circuit (3-D IC). With the significant increase in the number of …

Modeling and analysis of cracked through silicon via (TSV) interconnections

V Gerakis, C Avdikou, A Liolios… - … Symposium on Design …, 2014 - ieeexplore.ieee.org
A lumped analytical electrical model for cracked (open fault) TSVs is proposed in this paper.
Accurate and reliable fault models can support the test methods for the possible defects and …

Wideband 40ghz tsv modeling analysis under high speed on double side probing methodology

CH Wang, KC Fan, HH Lee - 2015 IEEE 65th Electronic …, 2015 - ieeexplore.ieee.org
The Wide bandwidth and smaller form factor, high-speed TSV I/O channel design in three-
dimensional integrated circuit (3D IC) becomes a trend with the unremittingly evolving …

Nondestructive Defect Detection and Localization of Defects in Annular Through Silicon Via (TSV)

D Li, J Su - 2019 Cross Strait Quad-Regional Radio Science …, 2019 - ieeexplore.ieee.org
In the non-ideal manufacturing process of Through Silicon Vias (TSV), many factors
including nonuniform filling, not completely chemical mechanical polishing, tilted vias will …

Electrical model analysis of RF/high-speed performance for different designed TSV patterns by wideband double side measurement techniques

CH Lin, C Liu, HK Huang, KC Fan… - 2012 7th International …, 2012 - ieeexplore.ieee.org
Within this paper, four different pitches of Through Silicon Via (TSV) of single-ended ground-
signal-ground (GSG) signaling configuration with redistribution layer (RDL) and testing pad …

Characterization of the Silicon Substrate Considering Frequency-Dependent Parameters in TSV-Based 3-D ICs

Y Zhao, D Song - 2022 23rd International Conference on …, 2022 - ieeexplore.ieee.org
In this paper, the characterization of silicon substrate is investigated based on related
frequency-dependent parameters induced by the TSV as well as the silicon substrate. It is …