Strategies for inorganic incorporation using neat block copolymer thin films for etch mask function and nanotechnological application
Block copolymers (BCPs) and their directed self‐assembly (DSA) has emerged as a
realizable complementary tool to aid optical patterning of device elements for future …
realizable complementary tool to aid optical patterning of device elements for future …
Rapid ordering of block copolymer thin films
PW Majewski, KG Yager - Journal of Physics: Condensed Matter, 2016 - iopscience.iop.org
Block-copolymers self-assemble into diverse morphologies, where nanoscale order can be
finely tuned via block architecture and processing conditions. However, the ultimate usage …
finely tuned via block architecture and processing conditions. However, the ultimate usage …
Nanopatterning via solvent vapor annealing of block copolymer thin films
The self-assembly of block copolymers to generate nanopatterns is of great interest as an
inexpensive approach to sub-20 nm lithography. Compared to thermal annealing, solvent …
inexpensive approach to sub-20 nm lithography. Compared to thermal annealing, solvent …
Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - iopscience.iop.org
Directed self-assembly (DSA) emerges as one of the most promising new patterning
techniques for single digit miniaturization and next generation lithography. DSA achieves …
techniques for single digit miniaturization and next generation lithography. DSA achieves …
GISAXS and GISANS as metrology technique for understanding the 3D morphology of block copolymer thin films
P Müller-Buschbaum - European Polymer Journal, 2016 - Elsevier
Grazing incidence small angle X-ray scattering (GISAXS) and grazing incidence small angle
neutron scattering (GISANS) have developed as advanced thin film characterization …
neutron scattering (GISANS) have developed as advanced thin film characterization …
Shape-anisotropic diblock copolymer particles from evaporative emulsions: Experiment and theory
Self-assembly of block copolymers (BCPs) in evaporative emulsion provides a simple and
effective route for the preparation of anisotropic particles with controlled shape and size …
effective route for the preparation of anisotropic particles with controlled shape and size …
Metalloblock copolymers: new functional nanomaterials
J Zhou, GR Whittell, I Manners - Macromolecules, 2014 - ACS Publications
Block copolymers containing metal centers and related segmented architectures are
attracting attention as a class of materials with properties and functions that complement …
attracting attention as a class of materials with properties and functions that complement …
Deconvoluting the mechanism of microwave annealing of block copolymer thin films
The self-assembly of block copolymer (BCP) thin films is a versatile method for producing
periodic nanoscale patterns with a variety of shapes. The key to attaining a desired pattern …
periodic nanoscale patterns with a variety of shapes. The key to attaining a desired pattern …
Fine Tuning of Lithographic Masks through Thin Films of PS-b-PMMA with Different Molar Mass by Rapid Thermal Processing
F Ferrarese Lupi, TJ Giammaria… - … applied materials & …, 2014 - ACS Publications
The self-assembly of asymmetric polystyrene-b-poly (methyl methacrylate)(PS-b-PMMA)
block copolymer based nanoporous thin films over a broad range of molar mass (M n) …
block copolymer based nanoporous thin films over a broad range of molar mass (M n) …
Using block copolymers as infiltration sites for development of future nanoelectronic devices: Achievements, barriers, and opportunities
Creating inorganic nanostructures for development of nanoelectronic device components is
a highly active research area. The ability for manipulation of the chemistry of materials, as …
a highly active research area. The ability for manipulation of the chemistry of materials, as …