Progress in nanoscale dry processes for fabrication of high-aspect-ratio features: How can we control critical dimension uniformity at the bottom?
K Ishikawa, K Karahashi, T Ishijima… - Japanese Journal of …, 2018 - iopscience.iop.org
In this review, we discuss the progress of emerging dry processes for nanoscale fabrication
of high-aspect-ratio features, including emerging design technology for manufacturability …
of high-aspect-ratio features, including emerging design technology for manufacturability …
Physics-informed neural networks for solving the Boltzmann equation of the electron velocity distribution function in weakly ionized plasmas
S Kawaguchi, T Murakami - Japanese Journal of Applied …, 2022 - iopscience.iop.org
The equilibrium electron velocity distribution function (EVDF) and electron transport
coefficient in weakly ionized plasmas under crossed DC uniform electric and magnetic fields …
coefficient in weakly ionized plasmas under crossed DC uniform electric and magnetic fields …
A Monte Carlo simulation of ion transport at finite temperatures
Z Ristivojevic, ZL Petrović - Plasma Sources Science and …, 2012 - iopscience.iop.org
We have developed a Monte Carlo simulation for ion transport in hot background gases,
which is an alternative way of solving the corresponding Boltzmann equation that …
which is an alternative way of solving the corresponding Boltzmann equation that …
Effective ionization coefficient of C5 perfluorinated ketone and its mixtures with air
Abstract C5 perfluorinated ketone (C5 PFK with UIPAC chemical name 1, 1, 1, 3, 4, 4, 4-
heptafluoro-3-(trifluoromethyl)-2-butanone and sold by 3M as Novec™ 5110) has a high …
heptafluoro-3-(trifluoromethyl)-2-butanone and sold by 3M as Novec™ 5110) has a high …
Foundations and interpretations of the pulsed-Townsend experiment
The pulsed-Townsend (PT) experiment is a well known swarm technique used to measure
transport properties from a current in an external circuit, the analysis of which is based on …
transport properties from a current in an external circuit, the analysis of which is based on …
Electron driven reactions in tetrafluoroethane: Positive and negative ion formation
J Pereira-da-Silva, R Rodrigues, J Ramos… - Journal of the …, 2021 - ACS Publications
In the search for alternatives to chlorine-containing gases, tetrafluoroethane, CF3CH2F
(R134a), a widely used refrigerant gas, has been recognized as a promising substitute for …
(R134a), a widely used refrigerant gas, has been recognized as a promising substitute for …
Non-thermal plasma instabilities induced by deformation of the electron energy distribution function
NA Dyatko, IV Kochetov… - Plasma Sources Science …, 2014 - iopscience.iop.org
Non-thermal plasma is a key component in gas lasers, microelectronics, medical
applications, waste gas cleaners, ozone generators, plasma igniters, flame holders, flow …
applications, waste gas cleaners, ozone generators, plasma igniters, flame holders, flow …
Scanning drift tube measurements of electron transport parameters in different gases: argon, synthetic air, methane and deuterium
Measurements of transport coefficients of electrons in a scanning drift tube apparatus are
reported for different gases: argon, synthetic air, methane and deuterium. The experimental …
reported for different gases: argon, synthetic air, methane and deuterium. The experimental …
Experimental determination of first Townsend ionization coefficient in mixtures of He and N2
First Townsend ionization coefficient α in gas mixture of He with N 2 is relevant for modeling
of the development and chemical activity of atmospheric pressure plasma jets. This study …
of the development and chemical activity of atmospheric pressure plasma jets. This study …
A scanning drift tube apparatus for spatiotemporal mapping of electron swarms
A “scanning” drift tube apparatus, capable of mapping of the spatiotemporal evolution of
electron swarms, developing between two plane electrodes under the effect of a …
electron swarms, developing between two plane electrodes under the effect of a …