Optical MEMS for lightwave communication

MC Wu, O Solgaard, JE Ford - Journal of Lightwave Technology, 2006 - ieeexplore.ieee.org
The intensive investment in optical microelectromechanical systems (MEMS) in the last
decade has led to many successful components that satisfy the requirements of lightwave …

[HTML][HTML] Optically read displacement detection using phase-modulated diffraction gratings with reduced zeroth-order reflections

RP Williams, SK Hord, NA Hall - Applied Physics Letters, 2017 - pubs.aip.org
Displacement detection using optical interferometric techniques allows for low minimum
detectable displacements which are unmatched by other displacement measurement …

Design and fabrication of silicon-based mid infrared multi-lenses for gas sensing applications

J Fonollosa, R Rubio, S Hartwig, S Marco… - Sensors and Actuators B …, 2008 - Elsevier
To improve the sensitivity of a non-dispersive infrared optical gas sensor, diffractive Fresnel
lenses have been designed, fabricated with silicon microtechnologies, and tested. The …

Web based collaborative visualization of distributed and parallel simulation

C Bajaj, S Cutchin - Proceedings of the 1999 IEEE symposium on …, 1999 - dl.acm.org
This paper presents an interaction model to support collaborative scientific visualization.
Relevant prior work is presented to contextualize the model and its import. An …

Tunable blazed gratings

X Li, C Antoine, D Lee, JS Wang… - Journal of …, 2006 - ieeexplore.ieee.org
In this paper, we report on the design, fabrication, and characterization of blazed gratings
made tunable by electrostatic actuation. We combine KOH etching and deep-reactive ion …

An electromagnetically driven lamellar grating based Fourier transform microspectrometer

Y Hongbin, Z Guangya, CF Siong… - Journal of …, 2008 - iopscience.iop.org
A lamellar grating based Fourier transform micro-spectrometer is presented in this paper in
which an electromagnetic actuator is used to drive the mobile facets of the lamellar grating to …

Limits to the integration of filters and lenses on thermoelectric IR detectors by flip-chip techniques

J Fonollosa, M Carmona, J Santander… - Sensors and Actuators A …, 2009 - Elsevier
In the trend towards miniaturization, a detector module containing multiple IR sensor
channels is being built and characterized. In its final form it contains thermopiles, narrow …

Pitch-variable blazed grating consisting of freestanding silicon beams

Y Wang, Y Kanamori, K Hane - Optics Express, 2009 - opg.optica.org
Theoretical analysis is presented for a pitch-variable blazed grating which consists of
freestanding silicon beams. The pitch-variable blazed grating is implemented by combining …

High-speed tuning of visible laser wavelength using a nanoimprinted grating optical tunable filter

NT Huang, SC Truxal, YC Tung, A Hsiao… - Applied physics …, 2009 - pubs.aip.org
We report on a microelectromechanical tunable optical filter incorporating strain-tunable
nanoimprinted elastomeric grating with a pitch varied by 18%. This device enables tuning of …

Design and fabrication of freestanding pitch-variable blazed gratings on a silicon-on-insulator wafer

Y Wang, Y Kanamori, T Sasaki… - … of Micromechanics and …, 2009 - iopscience.iop.org
This paper presents the design, fabrication and characterization of tunable blazed gratings
by combining microactuators. A two-mask process is used to define a four-level blazed …