Dielectrics represent a new frontier for surface-enhanced Raman scattering. They can serve
as either a complement or an alternative to conventional, metal-based SERS, offering key …

Materials patterned with high‐aspect‐ratio nanostructures have features on similar length
scales to cellular components. These surfaces are an extreme topography on the cellular …

The nanostructuring of silicon surfaces—known as black silicon—is a promising approach to
eliminate front-surface reflection in photovoltaic devices without the need for a conventional …

Black silicon (BSi) represents a very active research area in renewable energy materials.
The rise of BSi as a focus of study for its fundamental properties and potentially lucrative …

The transmission and processing of signals carried by optical beams rather than by
electrical currents or radio waves has been a topic of great interest ever since the early …

This paper presents a novel process for the fabrication of out-of-plane hollow microneedles
in silicon. The fabrication method consists of a sequence of deep-reactive ion etching …

An intensive study has been performed to understand and tune deep reactive ion etch
(DRIE) processes for optimum results with respect to the silicon etch rate, etch profile and …

Different processes involving an inductively coupled plasma reactor are presented either for
deep reactive ion etching or for isotropic etching of silicon. On one hand, high aspect ratio …

Because of the low dimensional power of its force scaling law, surface tension is appropriate
for carrying out reshaping and assembly in the microstructure size domain. This paper …

The evolution of silicon cryoetching is reported in this topical review, from its very first
introduction by a Japanese team to today's advanced technologies. The main advances in …