Heating center PCRAM structure and methods for making

SH Chen - US Patent 8,158,965, 2012 - Google Patents
Memory devices are described along with manufacturing methods. A memory device as
described herein includes a bottom electrode and a first phase change layer comprising a …

Precursor formulations for polishing pads produced by an additive manufacturing process

R Bajaj, D Redfield, MC Orilall, FU Boyi… - US Patent …, 2022 - Google Patents
Embodiments of the present disclosure relate to advanced polishing pads with tunable
chemical, material and structural properties, and new methods of manufacturing the same …

Integrated abrasive polishing pads and manufacturing methods

A Kumar, A Chockalingam, S Ganapathiappan… - US Patent …, 2022 - Google Patents
Embodiments described herein relate to integrated abrasive (IA) polishing pads, and
methods of manufacturing IA polishing pads using, at least in part, surface functionalized …

Collimator for use in substrate processing chambers

ML Riker - US Patent 9,543,126, 2017 - Google Patents
(57) ABSTRACT Related US Application Data Embodiments of collimators for use in
Substrate processing (60) Provisional application No. 62/085,009, filed on Nov. chambers …

Piezo-electric end-pointing for 3D printed CMP pads

V Hariharan, R Bajaj, D Redfield - US Patent 10,919,123, 2021 - Google Patents
Embodiments described herein relate to methods of detect ing a polishing endpoint using
one or more sensors embed ded in the polishing material of a polishing pad, the polish ing …

Composite target sputtering for forming doped phase change materials

HY Cheng, CF Chen, HL Lung, YH Shih… - US Patent …, 2013 - Google Patents
(57) ABSTRACT A layer of phase change material with silicon or another semiconductor, or
a silicon-based or other semiconductor based additive, is formed using a composite Sputter …

Biasable flux optimizer/collimator for pvd sputter chamber

ML Riker, F Zhang, A Infante, Z Wang - US Patent 9,960,024, 2018 - Google Patents
In some implementations described herein, a collimator that is biasable is provided. The
ability to bias the collimator allows control of the electric field through which the sputter …

Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles

K Krishnan, D Redfield, RE Perry, GE Menk… - US Patent …, 2024 - Google Patents
A polishing article manufacturing system includes a feed section and a take-up section, the
take-up section comprising a supply roll having a polishing article disposed thereon for a …

Hollow GST structure with dielectric fill

JF Zheng - US Patent 8,410,468, 2013 - Google Patents
A memory cell structure, including a substrate having a via therein bound at first and second
ends thereof by electrodes. The via is coated on side surfaces thereof with GST material …

Collimator for a physical vapor deposition chamber

ML Riker, L Zhong, F Zhang, Z Wang - US Patent App. 29/640,788, 2019 - Google Patents
( 12 ) United States Design Patent ( 10 ) Patent No . : Page 1 USOOD859333S ( 12 ) United
States Design Patent ( 10 ) Patent No . : Riker et al . ( 45 ) Date of Patent : US D859 , 333 S …