A review of actuation and sensing mechanisms in MEMS-based sensor devices

AS Algamili, MHM Khir, JO Dennis, AY Ahmed… - Nanoscale research …, 2021 - Springer
Over the last couple of decades, the advancement in Microelectromechanical System
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …

Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches

JJ Percy, S Kanthamani - Microelectronics Journal, 2023 - Elsevier
Abstract Micro Electro Mechanical System (MEMS) technology revolutionized electronics by
enabling miniaturization and integration of components like sensors, actuators, & switches …

Comprehensive study on RF-MEMS switches used for 5G scenario

LY Ma, N Soin, MHM Daut, SFWM Hatta - IEEE Access, 2019 - ieeexplore.ieee.org
This paper presents a comprehensive study on radio frequency-microelectromechanical
systems (RF-MEMS) switches, which are expected to be extensively integrated into 5G …

Design and performance analysis of low pull-in voltage of dimple type capacitive RF MEMS shunt switch for Ka-band

KG Sravani, D Prathyusha, KS Rao, PA Kumar… - IEEE …, 2019 - ieeexplore.ieee.org
This paper deals with the study of dimple type RF MEMS capacitive shunt switch using
different meandering techniques for high isolation and low actuation voltage. The novelty of …

Modeling and design enhancement of electrothermal actuators for microgripping applications

PD Pour, M Ghommem, A Abdelkefi - Applied Sciences, 2023 - mdpi.com
Microgrippers are miniature tools that have the capability to handle and manipulate micro-
and nano-scale objects. The present work demonstrates the potential impact of the …

Design and performance analysis of advanced MOSFET structures

M Aditya, KS Rao - Transactions on Electrical and Electronic Materials, 2022 - Springer
With respect to semiconductor industry, Complementary metal oxide semiconductor is
considered to be successful because of integration in Integrated Circuits (ICs). As transistor …

Electromagnetic modelling and analysis of RF MEMS capacitive shunt switch for 5G applications

CG Chand, R Maity, NP Maity - Microelectronics Journal, 2021 - Elsevier
This paper presents the Electromagnetic modelling and simulation analysis of an RF MEMS
Shunt switch. The S parameters are investigated with different analysis such as changing …

An L-slot frequency reconfigurable antenna based on MEMS technology

Y Chen, H Guo, Y Liu, J Li, Y Zhan, Q Wu, M Li - Micromachines, 2023 - mdpi.com
Given the shortage of spectrum resources and the demand for communication systems of
diminutive size, multi-function, and adaptive characteristics, this paper proposes an L-slot …

Comparison of drain current characteristics of advanced MOSFET structures-a review

M Aditya, KS Rao, B Balaji, KG Sravani - Silicon, 2022 - Springer
For the semiconductor industry, Complementary metal oxide semiconductor is contemplated
to be outstanding because of synthesis in Integrated Circuits (ICs). As transistor size is …

Design, modeling and analysis of perforated RF MEMS capacitive shunt switch

KS Rao, CG Chand, KG Sravani, D Prathyusha… - IEEE …, 2019 - ieeexplore.ieee.org
This paper illustrates the design, modeling, and analysis of bridge type structure based
capacitive RF MEMS switch with different beam thickness and materials. We have used …