Measurements of the vacuum-ultraviolet (< 80-nm) radiation produced by intense ultraviolet
(248-nm) irradiation (10^ 15–10^ 16 W/cm^ 2) of rare gases have revealed the copious …

This new edition of the bestselling Microlithography: Science and Technology provides a
balanced treatment of theoretical and operational considerations, from elementary concepts …

An extreme-ultraviolet (EUV) radiation source near the 13-nm wavelength generated in a
small (1.1 J) pinch plasma is presented. The ignition of the plasma occurs in a …

Experiments investigating soft X-ray emission in the 1–22 nm wavelength range from
plasmas produced using a gas puff target irradiated with a Nd: YAG laser are described. Gas …

Spectra of laser-produced plasmas of the elements from tin to iodine contain weak bands of
quasicontinuum overlaid by weak emission lines in the 70–120-Å region. Multiconfiguration …

Extreme ultraviolet (EUV) emission in the 8–18 nm wavelength range from a new double-
stream gas puff target irradiated with a Nd: YAG laser has been studied for the first time. The …

We have observed intense extreme-ultraviolet emission, within the 10–16-nm-wavelength
range, emitted by a xenon capillary discharge plasma. Within a 0.3-nm bandwidth centered …

The development of a unified picture of short-pulse high-intensity multiphoton processes,
embracing atoms, molecules, and solids, appears possible through the study of clusters. Of …

A newly developed compact laser plasma EUV source for metrology applications is
presented in the paper. The source is based on the double-stream gas puff target formed by …

The nonlinear coupling of 193-nm radiation to a range of atomic and molecular materials
has been experimentally explored up to a maximum intensity on the order of∼ 10 17 W/cm …