L Xie,
H Zhu, Y Zhang, X Ai, J Li, G Wang, A Du, Z Kong… - Nanomaterials, 2021 - mdpi.com
For the formation of nano-scale Ge channels in vertical Gate-all-around field-effect
transistors (vGAAFETs), the selective isotropic etching of Ge selective to Ge0. 8Si0. 2 was …