Challenges to Optimize Charge Trapping Non-Volatile Flash Memory Cells: A Case Study of HfO2/Al2O3 Nanolaminated Stacks

D Spassov, A Paskaleva - Nanomaterials, 2023 - mdpi.com
The requirements for ever-increasing volumes of data storage have urged intensive studies
to find feasible means to satisfy them. In the long run, new device concepts and technologies …

Preparation of Remote Plasma Atomic Layer-Deposited HfO2 Thin Films with High Charge Trapping Densities and Their Application in Nonvolatile Memory Devices

JH Yoo, WJ Park, SW Kim, GR Lee, JH Kim, JH Lee… - Nanomaterials, 2023 - mdpi.com
Optimization of equipment structure and process conditions is essential to obtain thin films
with the required properties, such as film thickness, trapped charge density, leakage current …

Performance variation with pristine and doped high‐k materials via atomic layer deposition

ES Jung, JU Yoo, TM Choi, HR Lee… - … Journal of Applied …, 2024 - Wiley Online Library
This review examines the performance variations of pristine and doped high‐k materials
deposited using atomic layer deposition (ALD). This paper explores the fundamental …

Synergic Impacts of CF4 Plasma Treatment and Post-thermal Annealing on the Nonvolatile Memory Performance of Charge-Trap-Assisted Memory Thin-Film Transistors Using …

JJ Kim, SM Yoon - ACS Applied Electronic Materials, 2022 - ACS Publications
Charge-trap-assisted memory thin-film transistors (CTM-TFTs) using the engineered Al-
doped HfO2 (Al: HfO2) CTL and In–Ga–Zn–O channel were fabricated and characterized to …

Analysis of HfO2 charge trapping layer characteristics after UV treatment

J Kim, J Kim, EC Cho, J Yi - ECS Journal of Solid State Science …, 2021 - iopscience.iop.org
The improvement in the charge storage characteristics in a non-volatile memory (NVM)
device employing an ultraviolet (UV)-treated hafnium oxide (HfO 2) layer as the charge …

Smart pH Sensing: A Self-Sensitivity Programmable Platform with Multi-Functional Charge-Trap-Flash ISFET Technology

YU Kim, WJ Cho - Sensors, 2024 - mdpi.com
This study presents a novel pH sensor platform utilizing charge-trap-flash-type metal oxide
semiconductor field-effect transistors (CTF-type MOSFETs) for enhanced sensitivity and self …

The Reliability Impact of Bi Doping on the HfO2 Charge-Trapping Layer: A First-Principles Study

F Ye, Y Zhu, JH Yuan, J Wang - Journal of Electronic Materials, 2024 - Springer
Hafnia has emerged as a promising material for charge-trapping memory. However,
enhancing its trapping performance remains a significant research challenge. In this work …

Optimization of HfO2/Al2O3 Dielectric Stacks for Charge Trapping Memories

D Spassov, A Paskaleva - 2021 IEEE 32nd International …, 2021 - ieeexplore.ieee.org
In this work, a summary of our recent studies on the potential of HfO2/AhO3 nanolaminated
stacks to be implemented as charge storage layers in CTMs is presented. The stacks are …